Optical assembly packaging structure
A packaging structure and optical component technology, applied in the direction of electrical components, electrical solid-state devices, semiconductor devices, etc., can solve the problems of reducing product life, reducing measurement accuracy, mutual interference, etc., to reduce production costs and improve accuracy , the effect of good signal-to-noise ratio
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no. 1 example 〕
[0034] see figure 1 , figure 1 It is a schematic diagram of the packaging structure of the optical component according to the first embodiment of the present invention. It can be seen from the above figures that the first embodiment of the present invention provides an optical component packaging structure 10 including a far-infrared sensor chip 110 , a packaging shell 120 , a first metal layer 130 and a cover 140 . The far-infrared sensor chip 110 includes a semiconductor substrate 112 and a semiconductor stack structure 114 . The semiconductor substrate 112 has a first surface S1, a second surface S2 opposite to the first surface S1, and a cavity 112a. In this embodiment, the semiconductor substrate 112 is illustrated by taking a silicon substrate as an example. In other embodiments, the semiconductor substrate 112 may also adopt other substrates that are properly matched with the semiconductor stack structure 114 . In addition, the semiconductor stack structure 114 is di...
no. 2 example
[0041] see figure 2 , figure 2 It is a schematic diagram of the packaging structure of the optical component according to the second embodiment of the present invention. The optical component packaging structure 10 a of the second embodiment of the present invention is similar to the optical component packaging structure 10 of the first embodiment of the present invention, and the similarities can be referred to above, and will not be repeated here. The difference between the optical component packaging structure 10a of the second embodiment of the present invention and the optical component packaging structure 10 of the first embodiment of the present invention is that the packaging housing 120 of the optical component packaging structure 10a of the second embodiment of the present invention includes a plurality of The metal wires (131, 132) located in the package casing 120, and part of the metal wires (131, 132) are electrically connected with the far-infrared sensing ch...
no. 3 example
[0044] see image 3 , image 3 It is a schematic diagram of the packaging structure of the optical component according to the third embodiment of the present invention. The optical component packaging structure 10b of the third embodiment of the present invention is similar to the optical component packaging structure 10 of the first embodiment of the present invention, and similar parts can be referred to above, and will not be repeated here. The difference between the optical component packaging structure 10b of the third embodiment of the present invention and the optical component packaging structure 10 of the first embodiment of the present invention is that the cover 140 of the optical component packaging structure 10b of the third embodiment of the present invention includes a light-transmitting The substrate 142 and a second metal layer 144, the second metal layer 144 is disposed on the transparent substrate 142 and has a first opening 144a exposing the transparent su...
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