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Processing method and device of continuous phase plate

A processing method and phase plate technology, applied in metal processing equipment, manufacturing tools, machine tools suitable for grinding workpiece edges, etc., can solve problems such as reduced processing efficiency, large polishing spot size, and inability to realize small-period structural processing, etc. Achieve the effect of improving processing efficiency and achieving high-precision processing

Active Publication Date: 2018-06-01
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

[0003] At present, the existing methods for processing continuous phase plates are mainly processed by sub-aperture polishing technology, and the polishing technologies used are mainly numerical control small tool and magnetorheological polishing, but the use of numerical control small tool polishing is due to the large size of the polishing spot ( More than a dozen millimeters) cannot realize small cycle structure processing
When the magnetorheological processing method is used, the multi-period structure of the phase plate is fully processed. In order to achieve high precision, small polishing spots must be used, but this will greatly reduce the processing efficiency.

Method used

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  • Processing method and device of continuous phase plate
  • Processing method and device of continuous phase plate
  • Processing method and device of continuous phase plate

Examples

Experimental program
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no. 1 example

[0032] Please refer to figure 2 , the present embodiment provides a continuous phase plate processing method, the method comprising:

[0033] Step S200: acquiring magnetorheological polishing spots of different widths;

[0034] In this embodiment, by obtaining magnetorheological polishing spots with different widths, it can correspond to continuous phase plate processing of various periodic structures. It can be understood that the obtained multiple magnetorheological polishing spots may have different widths, which may be selected according to the specific design and processing requirements of the continuous phase plate periodic structure.

[0035] Step S210: Based on the different widths of the magnetorheological polishing spots, segment and extract the surface periodic structure of the continuous phase plate, and generate multiple design drawings of the phase plate with different periodic structures;

[0036]In this embodiment, the surface of the continuous phase plate i...

specific example

[0059] like Figure 8 As shown, a continuous phase plate element with a size of 90mm×90mm is designed, and the spatial structure period contained in it is 6mm to 50mm. By controlling the parameters of the magnetorheological polishing process, polishing spots with widths of 1.9mm, 3.2mm and 9.5mm were obtained, and the processing scheme shown in Table 1 was planned.

[0060] Table 1 Correspondence table between space period and polishing spot width

[0061]

[0062] like Figure 9 As shown, using the filter frequency division software, the surface diagrams of different periods are generated, and the magnetorheological processing technology is used for processing, and the processing results of different periods are obtained. Residual Error Map ERMS.

[0063] like Figure 10 As shown, finally through the full-cycle surface shape test, the full-cycle processing results and residual error diagram of the continuous phase plate are obtained. The residual error ERMS value is 12...

no. 2 example

[0066] Please refer to Figure 11 , this embodiment provides a continuous phase plate processing device 800, which includes:

[0067] An acquisition module 810, configured to acquire magnetorheological polishing spots of different widths;

[0068] The segmentation module 820 is used to segment and extract the surface periodic structure of the continuous phase plate based on the different widths of the magnetorheological polishing spots, and generate multiple phase plate design drawings with different periodic structures;

[0069] The processing module 830 is configured to use the magnetorheological polishing spots of different widths to process the continuous phase plate based on the multiple phase plate design drawings with different periodic structures to obtain a processing result.

[0070] Please refer to Figure 12 , in this embodiment, the continuous phase plate processing device 800 may also include:

[0071] The design module 840 is configured to design the surface ...

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Abstract

The invention provides a processing method and a device of a continuous phase plate, and relates to the technical field of phase plate processing. The processing method of the continuous phase plate comprises the steps of obtaining magnetorheological polishing spots with different widths; partitioning and extracting the periodic structure of the surface of the continuous phase plate according to the different widths of the magnetorheological polishing spots so as to generate a plurality of design drawings of the phase plate with different periodic structures; and processing the continuous phase plate by utilizing the magnetorheological polishing spots with the different widths according to the plurality of design drawings of the phase plate with the different periodic structures so as to obtain processing results. Compared with the prior art, the processing method and the device of the continuous phase plate have the advantages that the magnetorheological polishing spots with the different widths are obtained, and the different periodic structures of the continuous phase plate are extracted so as to be respectively processed, so that the high-precision processing of the continuousphase plate is realized, and additionally, the processing efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of phase plate processing, in particular to a continuous phase plate processing method and device. Background technique [0002] Continuous phase plates (Continuous Phase Plates, CPP) are continuously distributed diffractive optical elements, which can effectively control the output beam shape, size, uniformity and other parameters of the laser system. Because the CPP element has the advantages of high energy utilization rate and easy control of the focal spot shape, CPP is widely used in the world's major laser drive devices as a space smoothing device. However, the complex structural features and high-precision processing requirements of CPP have brought great difficulties to the processing of CPP, which cannot be realized by traditional processing devices and processes. Magneto-rheological polishing technology is a sub-aperture precision polishing technology. Since the polishing spots it produces are on ...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B31/10
CPCB24B1/005B24B31/10
Inventor 侯晶李洁许乔王健钟波邓文辉陈贤华唐才学温圣林
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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