A segmented double-film electrothermally actuated mems switch with a compliant mechanism

A technology of electrothermal drive and compliant mechanism, applied in thermal switch parts and other directions, can solve the problems of unfavorable device life and stability, high power consumption of electromagnetic drive, high electrostatic voltage, shorten the production cycle, fast recovery effect, response fast time effect

Inactive Publication Date: 2019-07-02
SHANGHAI INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The micro-drive MEMS switch with electrostatic drive structure has the advantages of simple structure and low power consumption, but the electrostatic voltage required to maintain its good working performance is relatively high, which is not conducive to the life and stability of the device; the drive voltage required for electromagnetic drive is low , large output torque and wide output range, but the power consumption required by electromagnetic drive is relatively large, low efficiency and complex structure

Method used

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  • A segmented double-film electrothermally actuated mems switch with a compliant mechanism
  • A segmented double-film electrothermally actuated mems switch with a compliant mechanism
  • A segmented double-film electrothermally actuated mems switch with a compliant mechanism

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Embodiment Construction

[0027] To further illustrate the various embodiments, the present invention is provided with accompanying drawings. These drawings are a part of the disclosure of the present invention, which are mainly used to illustrate the embodiments, and can be combined with related descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, those skilled in the art should understand other possible implementations and advantages of the present invention. Components in the figures are not drawn to scale, and similar component symbols are generally used to denote similar components.

[0028] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments.

[0029] like figure 1 As shown, a segmented double-layer membrane electrothermally driven MEMS switch with a compliant mechanism includes: a first static contact point 1, a substrate 2, an arc-shaped electric contact ma...

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Abstract

The invention relates to a micro-driver in the technical field of MEMS, and belongs to a segmented-type double-layer membrane electric heating drive MEMS switch with a compliant mechanism. The switchcomprises a substrate, a segmented-type double-layer membrane electric heating drive unit, a base, and an electric contact unit. The double-layer membrane electric heating drive unit, the base and theelectric contact unit are located on a substrate, and the double-layer membrane electric heating drive unit is fixed on the base. The base is fixedly connected with the substrate, and the electric contact unit is disposed above the segmented-type double-layer membrane electric heating drive unit. The electric contact unit comprises a static contact point, a V-shaped support beam, a flexible spring, and an arc-shaped electric contact mass block. The V-shaped support beam is fixed above the segmented-type double-layer membrane electric heating drive unit, and the arc-shaped electric contact mass block is connected to the V-shaped support beam through the flexible spring. The static contact point is disposed above the arc-shaped electric contact mass block, and the static contact point cooperates with the arc-shaped electric contact mass block, and is connected with a peripheral circuit.

Description

technical field [0001] The invention relates to a micro-driver in the technical field of micro-electro-mechanical systems, specifically, it belongs to a segmented double-layer membrane electrothermally driven MEMS switch with a compliant mechanism. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) have played an increasingly important role in the rapidly developing science and technology. Micro-structured devices and systems have received worldwide attention in aerospace, medical, mechanical, biological and other disciplines. Micro-actuator MEMS switch is one of the most important core technologies of MEMS, and its driving mechanism and device preparation have become the focus of various research institutions in recent years. The operating range, response speed, and structural reliability of micro-drive MEMS switches determine the product quality of micro-drive MEMS switches, and are the most important link in the development of micro-electromechanical sy...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01H37/46
CPCH01H37/46
Inventor 伍林张洋洋
Owner SHANGHAI INST OF TECH
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