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Method for measuring fluorine gas content in fluorine-containing mixing gas through gas chromatography method

A gas chromatography and mixed gas technology, applied in the field of fluorine gas content measurement, can solve the problems of low detection limit, small error, difficult separation, etc., achieve high accuracy and solve the effect of fluorine resistance

Active Publication Date: 2015-09-16
FUJIAN YONGJING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Gas chromatography can quickly determine the content of various components in the sample. It has low requirements on the accuracy of sampling pressure, small error, and low detection limit. It reacts with inorganic fillers, so it is easy to damage the chromatographic column, and the fluorine gas sample contains oxygen. The molecular diameter and polarity of oxygen and fluorine are very similar, and their separation is also difficult.

Method used

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  • Method for measuring fluorine gas content in fluorine-containing mixing gas through gas chromatography method
  • Method for measuring fluorine gas content in fluorine-containing mixing gas through gas chromatography method
  • Method for measuring fluorine gas content in fluorine-containing mixing gas through gas chromatography method

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Embodiment 1

[0044] The mensuration of fluorine content in the fluorine-nitrogen mixed gas of embodiment 1

[0045] 1. The experimental conditions are:

[0046] Carrier gas: helium, purity 99.9%, flow rate 25ml / min

[0047] Carrier gas pressure: 150kpa

[0048] The first chromatographic column: Φ2mm×0.5m (inner diameter×height); filler: polytrifluorochloroethylene 60-80 mesh (permanent column)

[0049] Second chromatographic column: Φ2mm×1m (inner diameter×height) Packing agent: Potassium chloride (AR) 60-80 mesh (consumption column)

[0050] The third chromatographic column: Φ2mm×2m (inner diameter×height) filler: perfluoropolystyrene 40-60 mesh (permanent column)

[0051] Fourth chromatographic column: Φ2mm×0.5m (inner diameter×height); filler: polychlorotrifluoroethylene 60-80 mesh (permanent column)

[0052] The fifth chromatographic column: Φ2mm×1m (inner diameter×height) filler: silver powder (99.9) 40-60 mesh (consumption column)

[0053] Sixth chromatographic column: Φ2mm×1.5m...

Embodiment 2 6

[0076] The mensuration of fluorine content in the sulfur hexafluoride reaction gas of embodiment 2

[0077] 1. The experimental conditions are:

[0078] Carrier gas: helium, purity 99.9%, flow rate 30mL / min

[0079] Carrier gas pressure: 150kpa

[0080] The first chromatographic column: Φ2mm×0.5m (inner diameter×height); filler: polytrifluorochloroethylene 60-80 mesh (permanent column)

[0081] Second chromatographic column: Φ2mm×1m (inner diameter×height) Packing agent: Potassium chloride (AR) 60-80 mesh (consumption column)

[0082] The third chromatographic column: Φ2mm×2m (inner diameter×height) filler: perfluoropolystyrene 40-60 mesh (permanent column)

[0083] Fourth chromatographic column: Φ2mm×0.5m (inner diameter×height); filler: polychlorotrifluoroethylene 60-80 mesh (permanent column)

[0084] The fifth chromatographic column: Φ2mm×1m (inner diameter×height) filler: silver powder (99.9) 40-60 mesh (consumption column)

[0085] Sixth chromatographic column: Φ2mm...

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Abstract

The present invention discloses a method for measuring the fluorine gas content in fluorine-containing mixing gas through a gas chromatography method. The method comprises that a fluorine-containing mixing gas sample passes through a chromatography instrument having two gas path systems to detect, wherein the first gas path detects the content of the mixed gas of oxygen gas, nitrogen gas and chlorine gas, and the second gas path system detects the oxygen gas content and the nitrogen gas content; and the measured content of the mixed gas of the oxygen gas, the nitrogen gas and the chlorine gas is subtracted by the oxygen gas content and the nitrogen gas content to obtain the chlorine gas content, ie., the fluorine gas content in the fluorine-containing mixing gas sample. The method has characteristics of simple operation, less error, and high accuracy.

Description

technical field [0001] The invention relates to a method for measuring the content of fluorine gas, in particular to a method for measuring the content of fluorine gas in a fluorine-containing mixed gas by gas chromatography. Background technique [0002] Fluorine gas is a very corrosive pale yellow diatomic gas with a strong pungent smell and a strong oxidant. At room temperature, it can combine with almost all elements and generate a lot of heat energy. [0003] At present, medium-temperature electrolytic fluorine production is the main development direction of domestic and foreign electrolytic fluorine production processes. The fluorine gas produced contains oxygen, nitrogen, carbon tetrafluoride, hydrogen fluoride and other impurity gases. Fluorine gas is also the raw material for the industrial production of sulfur hexafluoride, and the control of the concentration of fluorine gas during the production of sulfur hexafluoride plays a guiding role in the production of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/02G01N30/06
Inventor 刘春花吴云秀
Owner FUJIAN YONGJING TECH CO LTD
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