Multi-module packaging vacuum furnace for welding elements and using method thereof

Abstract

The invention provides a multi-module packaging vacuum furnace for welding elements. The multi-module packaging vacuum furnace comprises a vacuum cavity, jigs, a lifting device, a movable baffle mechanism, a heating mechanism, a water cooling mechanism, a valve pump mechanism and a control device. The lifting device, the movable baffle mechanism, the heating mechanism, the water cooling mechanismand the valve pump mechanism are in communication connection with the control device. The invention further provides a using method of the vacuum furnace. The using method comprises the steps that themultiple layers of jigs are placed into a cavity body from bottom to top; the interior of the cavity body is vacuumized, and a baffle extends out to form a shielding state; when the vacuum degree inthe cavity body reaches the activation vacuum degree, a lower heating carrying table is heated to an activation temperature, the temperature is kept for a first time period, and after the cavity bodyis cooled to a safety temperature, the baffle is reset and returns to the reset state; the lifting device descends to the lowest point, a tube shell jig layer is tightly attached to a germanium windowjig layer, and heating is carried out to a welding temperature; and after welding is completed, the welded elements are taken down from the tube shell jig layer. According to the multi-module packaging vacuum furnace and the using method, the efficient function of multiple modules is realized.

Description

technical field [0001] The present application relates to the field of vacuum furnaces for welding components, in particular to a multi-module packaging vacuum furnace for welding components. Background technique [0002] In the prior art, the packaging vacuum furnace used when welding components mostly adopts a single module structure and a small cavity structure: that is, the package is placed in one piece with fixtures, and the small area is the main structure, and the internal space of the vacuum cavity Smaller, mostly in the shape of a barrel; [0003] Most of the structures in the prior art cannot meet the single-layer small-area jig welding of the welding process of the same process and different temperatures; When packaging, the germanium window of the welding component is coated with GETTER getter, and the shell is coated with solder, and the activation of the GETTER getter needs to be kept at a temperature of 360°C for 20 minutes. If the temperature is directly re...

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Problems solved by technology

[0003] Most of the structures in the prior art cannot meet the single-layer small-area jig welding of the welding process of the same process and different temperatures; When packaging, the germanium window of the welding component is coated with GETTER getter, and the shell is coated with solder, and the activation of the GETTER getter needs to be kept at a temperature of 360°C for 20 minutes. If the temperature is directly reached to 360°C , then the melting point of the solder is reached during thermal activation and the solder melts

[0004] At the same time, when welding multi-layer and large-area fixtures, the flatness is not enough to meet the close fit of local areas, resulting in a series of problems such as temperature uniformity; at the same time, although the small cavity structure is convenient for achieving vacuum effect, it is also The size of the fixture in the cavity is limited, and the number of packages is small each time, which cannot meet the needs of mass production, and the cost is high;

[0005] In addition, the existing vacuum packaging equipment mostly adopts air blowing cooling method, and the cooling rate is low; it cannot fully meet the compatibility of different products under the same process; The problem of high vacuum, and the connection between the vacuum chamber and the vacuum pump through pipelines, the uneven distribution of nitrogen gas during the vacuuming process, etc.

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