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Long-life ring construction

A long-life, ring-shaped technology, applied in metal material coating technology, vacuum evaporation plating, coating, etc., can solve problems such as short service life, and achieve the effect of avoiding loss and prolonging service life

Active Publication Date: 2020-03-10
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the service life of the prior art ring structure is relatively short

Method used

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Embodiment Construction

[0025] It can be seen from the background technology that the service life of the ring structure is short, and the reason for the short service life of a ring structure is now analyzed. combined reference figure 1 and figure 2 , figure 1 shows a perspective view of a ring structure (only the ring body is shown), figure 2 show figure 1 Schematic diagram of the cross-sectional structure along the AA1 secant.

[0026] The ring structure is installed in the sputtering equipment and surrounds the sputtering target, and the ring structure includes: a ring (Coil) body 100 (such as figure 1 As shown), the ring body 100 is provided with a first through hole 110 passing through the ring body 100 (such as figure 1 shown), and the ring body 100 includes an inner wall 102 facing the sputtering target (such as figure 2 shown) and the outer wall 101 opposite to the inner wall 102 (as figure 2 shown); the installation fitting (not marked) whose material is the same as that of the r...

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Abstract

The invention provides a long-life ring part structure. The long-life ring part structure is installed in sputtering equipment and surrounds sputtering target materials. The long-life ring part structure comprises a ring part body and an mounting accessory, wherein the ring part body consists of an inner wall and an outer wall, the inner wall faces the sputtering target materials and the outer wall is opposite to the inner wall; and the mounting accessory is fixed on the outer wall and is used for installing the ring part body in the sputtering equipment, the mounting accessory comprises a connecting part, and the connecting part is used for being fixed in the sputtering equipment. The ring part structure comprises the mounting accessory fixed on the outer wall of the ring part body, and the mounting part comprises the connecting part and is used for being fixed in the sputtering equipment, so that the ring part body is arranged in the sputtering equipment; and compared with the mounting accessory which penetrates through the connecting part of the ring part body so as to achieve the fixing effect, the mounting accessory not only has the fixing function, but also due to the fact that the connecting part does not protrude out of the inner wall of the ring part body, the connecting part is not exposed in the sputtering environment and does not participate in the sputtering process, the loss of the connecting part in the sputtering process can be avoided, and the service life of the ring structure is prolonged.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a long-life ring structure. Background technique [0002] A sputtering deposition (Sputtering Deposition, SD) process is commonly used in semiconductor manufacturing, and the sputtering deposition process is used to sputter metal onto the surface of a substrate to form a thin film. Since the film prepared by sputtering deposition has the advantages of high hardness, low friction coefficient, good wear resistance and chemical stability, it has become one of the most common film formation processes in the field of semiconductor preparation. [0003] By bombarding the sputtering target with high-energy particles, the bombarded target atoms gain enough energy to escape from the sputtering surface of the sputtering target and migrate to the surface of the substrate under the action of electric field force or magnetic force. Atoms deposit and accumulate on the surface of the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34
CPCC23C14/34
Inventor 姚力军潘杰相原俊夫王学泽刘霞
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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