Error decoupling method for scanning Hartmann detection device
A detection device and error technology, applied in the field of wavefront aberration detection of optical systems, can solve the problems of affecting detection accuracy, low detection accuracy, mechanical motion error of moving devices, etc., and achieve the effect of improving detection accuracy
Active Publication Date: 2018-06-12
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
The method of scanning the Hartmann detection device needs to be equipped with a motion device to realize the scanning motion, and the motion device has mechanical motion errors, especially the pointing error of the light pipe during the scanning process, which seriously affects the detection accuracy
[0005] Therefore, in view of the problems existing in the method of scanning the Hartmann detection device, it is necessary to provide a solution to avoid the low detection accuracy due to the mechanical motion error of the motion device
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[0034] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.
[0035] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects and not necessarily Describe a specific order or sequence. It is to be understood that the terms so used are interchangeable under appropriate cir...
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The embodiment of the invention discloses an error decoupling method for scanning a Hartmann detection device. The method comprises the steps of building a wavefront reconstruction mathematical modelbased on a slope Zernike polynomial; adding a tilt term of a light tube array to a fitting model on the basis of the slope Zernike polynomial; decoupling a motion error, and outputting the reconstructed wavefront aberration. The embodiment of the invention adopts light tube array splicing to detect a large-aperture optical system, and eliminates a mechanical motion error of the light tube array inthe scanning detection process through introducing error decoupling based on slope Zernike polynomial fitting, so that the detection precision is greatly improved.
Description
technical field [0001] The present invention relates to the technical field of optical system wavefront aberration detection, and detects the wavefront aberration of a large-aperture space system based on the Hartmann (Hartmann) principle, and specifically relates to an error decoupling device for a Hartmann detection device method. Background technique [0002] The space optical system is the core of long-distance observation and earth remote sensing equipment, and its quality is the decisive factor for the imaging capability and observation level of the equipment. With the continuous development of space optics technology, the aperture and focal length of the space optics system continue to increase, and the difficulty of detecting the imaging quality of the whole machine also increases accordingly. [0003] The traditional detection method of external field wavefront aberration in space optical system is to simulate an infinite target (the target is usually a star point,...
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Inventor 胡海翔魏海松张学军闫锋程强
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI