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Mask plate and manufacturing method thereof

A manufacturing method and masking plate technology, which are applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of vapor deposition material mixing, deformation, etc., to reduce production cost and improve stability , Solve the effect of poor combination state

Active Publication Date: 2018-06-22
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention aims to propose a mask plate and its manufacturing method to solve the problem that the shielding portion of the mask plate in the prior art is welded to the metal frame separately due to the shielding portion and the support bar. The overlapping area with the support bar is slightly deformed under the magnetic attraction of the magnet plate, and it is easy to cause the evaporation material to not be deposited in the specific area of ​​the design during the evaporation process, resulting in the problem of color mixing

Method used

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  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof

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no. 1 example

[0026] figure 1 It is a schematic structural diagram of a mask plate according to an embodiment of the present invention. figure 2 It is a schematic diagram of the manufacturing process of the mask plate according to the embodiment of the present invention. Please combine figure 1 and figure 2 A mask plate 100 includes a frame body 101 , the middle part of the frame body 101 is recessed downward to form a concave portion 103 , and the frame body 101 and the concave portion 103 are integrally formed. The frame body 101 is disposed around the concave portion 103 , and a patterned grid 105 is formed in the concave portion 103 .

[0027] Specifically, the grid 105 includes a first part 105a and a second part 105b, the first part 105a includes a plurality of strip structures distributed in parallel in the first direction, and the second part 105b includes a plurality of strip structures parallel in the second direction In a distributed strip structure, the first part 105a and...

no. 2 example

[0039] The main difference between the second embodiment of the present invention and the above-mentioned first embodiment is that: the pattern area on the plurality of strip structures 108a of the precision mask 108 is formed by a plurality of regularly arranged circular holes, and the pattern of the strip structures 108a The area corresponds to the opening area 107 , and the evaporation material is attached to the substrate through the circular evaporation hole to form a target pattern. In this embodiment, the strip structure 108 a is disposed parallel to the second portion 105 b of the grid 105 .

[0040] For other structures of this embodiment, reference may be made to the above-mentioned first embodiment, which will not be repeated here.

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Abstract

The invention provides a mask plate which comprises an integrally-formed frame body, wherein the frame body is equipped with a concave part; a patterned grid is arranged in the concave part; the concave part is formed through etching on a whole thin plate; the concave part and the frame body arranged around the concave part are of an integrally-formed structure; the grid is formed through patterned processing on the concave part; and finally, a precision mask plate body is laid on the grid. The grid of the mask plate provided by the embodiment of the invention can further fit a substrate. Compared with a conventional mask plate, the mask plate provided by the invention has the advantages that the manufacturing cost is reduced, the PPA stability is improved, and the problems about color mixing, color breaking and other display flaws caused by the poor binding state between the substrate and the conventional mask plate are solved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate used for OLED evaporation and a manufacturing method thereof. Background technique [0002] In recent years, Organic Light Emitting Diode (OLED) displays have been considered by the industry as the next generation due to their thinness, active light emission, fast response, wide viewing angle, rich colors, high brightness, low power consumption, and high and low temperature resistance. A new display technology after Liquid Crystal Display (LCD), OLED display can be widely used in terminal products such as smartphones, tablet computers, and televisions. [0003] In the prior art, the OLED is evaporated in a vacuum environment, and the OLED substrate to be processed is installed with its evaporation surface facing down. When the metal mask for evaporation is arranged between the evaporation surface of the OLED substrate and the evaporation surface, Between the platin...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 刘亚红李俊峰
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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