An MEMS piezoelectric sensor and a manufacturing method thereof
A kind of piezoelectric sensor, technology of making method
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[0112] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0113] An embodiment of the present invention provides a manufacturing method of a MEMS piezoelectric sensor, such as figure 1 Shown, including:
[0114] S101: Provide a first substrate, the first substrate comprising a first substrate, at least one conductive layer located on one side of the first substrate, a signal processing circuit and / or a driving circuit, the signal processing circuit and / or Or the driving circuit is electrically co...
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