Digital holography and differential interference combined dual-channel phase-shift phase measuring microscope

Abstract

The invention relates to a digital holography and differential interference combined dual-channel phase-shift phase measuring microscope. The measuring microscope includes: a light beam adjusting andcoupling unit used for generating a measuring light beam; a phase shift phase shift differential interference microscope unit used for receiving the measuring light beam to form a corresponding imaging light beam and a first adjusting shear phase shift orthogonal polarized light; a phase shift digital holographic microscope unit used for receiving the measuring light beam and forming a corresponding imaging light beam; a common microscope imaging assembly used for receiving the first adjusting shear phase shift orthogonal polarized light and outputting the corresponding imaging light beam; anda control analysis unit used for controlling the formed imaging light beam and performing phase shift calculation and analysis on the imaging light beam to obtain a phase shift calculation and analysis result. Therefore, the embodiment of the invention increases accuracy of real-time three-dimensional dynamic phase measurement of a minimal transparent sample and provides a new quantified measuring means for cell, micro-flow field and micro-device research and correlated engineering application.

Description

technical field [0001] The invention relates to the technical field of microscopes, in particular to a dual-channel phase-shift phase measurement microscope combined with digital holography and differential interference. Background technique [0002] Microscopic technology provides two-dimensional and three-dimensional observation means of micro-scale samples by means of imaging and quantitative measurement (horizontal resolution ranges from nanometers to micrometers). There is at least one difference in precision, imaging methods and other aspects, which makes microscopic technology play a vital or even irreplaceable role in various fields of scientific and technological development. [0003] From the perspective of various microscopic techniques, the lateral resolution of the scanning electron microscope (SEM) reaches 0.2 nanometers, but it needs to be under vacuum conditions and requires the sample to be conductive, so it is difficult to perform dynamic and real-time meas...

AI Technical Summary

Problems solved by technology

This kind of all-liquid crystal differential interference phase measurement microscope almost overcomes all the shortcomings of differential interference microscope measurement, but there are also a set of beam shearing components, multi-step phase shift, low energy and information utilization, and converging light illumination. Deficiency in Interpretation of Measurement Results

[0009] In 2010, Fu et al. reported a microscopic technology of off-axis shearing differential interferometry phase measurement in perpendicular azimuths after imaging with an ordinary microscope, which is diffracted by an orthogonal grating on the image side, and the zero-order diffracted light interferes with the first-order diffracted light. The advantage of this method is that it only cuts on the image side, and the technique is simple, but it is difficult to adjust the amount and direction of the cut. The bigger problem is the inclination between the two cut image planes, which makes the measured The phase of is not the shear phase in the general sense

Miccio et al. proposed a method of directly using phase misalignment subtraction measured by digital holographic microscope to realize shear measurement, but this method is only suitable for the measurement of large shear, not suitable for image square shear less than one of the image sensor. The case of pixel spacing

[0010] To sum up, there are more or less deficiencies in the existing microscope technology and microscopes, which make it impossible for the existing microscope technology and microscopes to achieve high-precision real-time dynamic phase measurement of tiny transparent samples.

Images