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Reflective surface shape measuring method and apparatus based on two-dimensional optical lattice

A measurement method and reflective technology, applied in the field of optical measurement, can solve the problems of limited measurement range and low measurement flexibility, and achieve the effect of simplifying the measurement process, simplifying the measurement process, and strong adaptability

Active Publication Date: 2018-07-20
TIANJIN UNIV
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Problems solved by technology

However, since the structure of the microlens is fixed, its measurement range is also limited, and the measurement flexibility is not high

Method used

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  • Reflective surface shape measuring method and apparatus based on two-dimensional optical lattice
  • Reflective surface shape measuring method and apparatus based on two-dimensional optical lattice
  • Reflective surface shape measuring method and apparatus based on two-dimensional optical lattice

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Embodiment Construction

[0045] The inventive idea of ​​the reflective surface shape measurement method and device based on the two-dimensional optical lattice of the present disclosure is that: the outgoing light modulated by the spatial light modulator and twice Fourier transformed by the lens is respectively on the reflective measured surface and the reference plane An optical lattice is formed. The optical lattice on the measured surface is modulated by the surface shape of the measured surface and then shifted relative to the reference plane. According to the offset and the mode reconstruction algorithm based on the Zernike polynomial, the measured surface face shape.

[0046] The principle of the disclosure based on optical lattice for surface shape measurement is as follows:

[0047] image 3 It is a geometric model diagram of the surface shape measurement method of the embodiment of the present disclosure, such as image 3As shown, the surface to be measured is first placed horizontally, poi...

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Abstract

Provided are a reflective surface shape measuring method and apparatus based on a two-dimensional optical lattice. According to the method, emitting light that undergoes modulation of a spatial lightmodulator and that undergoes lens Fourier transform twice forms an optical lattice on a reflective to-be-measured surface and an optical lattice on a reference plane, the optical lattice on the to-be-measured surface shifts relative to the reference plane after undergoing surface shape modulation of the to-be-measured surface, and the surface shape of the to-be-measured surface is reconstructed onthe basis of the amount of shift and a mode reconstruction algorithm based on Zernike polynomials. The invention further provides the reflective surface shape measuring apparatus and applications ofthe method in shape changes of a measured object. According to the disclosure, measuring processes are simplified and quick measuring is realized.

Description

technical field [0001] The present disclosure relates to the field of optical measurement, in particular to a method and device for measuring reflective surface shape based on a two-dimensional optical lattice. Background technique [0002] Reflective devices are widely used in large-scale scientific facilities, microelectronics, modern national defense, medical machinery, scientific instruments, and high-end consumer goods. The impact of surface accuracy on equipment performance cannot be ignored, so the precision measurement of reflective devices has attracted much attention. . The advantages of non-contact, high precision and high efficiency of optical measurement method make it one of the important technologies of surface shape measurement. [0003] The optical non-contact measurement method obtains the surface shape information of the measured surface by receiving the optical signal modulated by the object. From the measurement principle, it can be divided into interfe...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25G01B11/00
CPCG01B11/002G01B11/254
Inventor 胡春光凌秋雨查日东李奇峰胡晓东李宏斌胡小唐
Owner TIANJIN UNIV
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