Temperature adjusting performance based graphene bionic light detector and preparation method thereof

A technology of temperature adjustment and graphene, which is applied in the field of photoelectric detection, can solve the problems of low absorption rate and low sensitivity, and achieve the effect of improving performance, low cost and realizing wavelength selectivity

Pending Publication Date: 2018-07-20
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a method for regulating the performance of graphene bionic photodetectors by temperature, in order to solve the problems of low absorption rate and low sensitivity of graphene photodetectors at the present stage. question

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  • Temperature adjusting performance based graphene bionic light detector and preparation method thereof
  • Temperature adjusting performance based graphene bionic light detector and preparation method thereof
  • Temperature adjusting performance based graphene bionic light detector and preparation method thereof

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Embodiment 1

[0074] see figure 1 , the present invention provides a kind of preparation method based on the graphene biomimetic photodetector of temperature regulating performance, it is characterized in that, comprises the steps:

[0075] 1) Graphene and a micro heater platform are provided, and the graphene is transferred to the micro heater platform;

[0076] 2) placing the structure obtained in step 1) in a chemical vapor deposition reaction furnace for annealing;

[0077] 3) using reagents to modify the annealed graphene surface to form an active film with active groups on the graphene surface;

[0078] 4) forming a photoreceptor protein on the surface of the active film, and combining the photoreceptor protein with the active group of the active film to form a covalent bond to connect the photoreceptor protein and the active film.

[0079] In step 1), see figure 1 Step S1 in and Figure 2a , providing graphene 2 and micro heater platform 1, and transferring the graphene 2 to the ...

Embodiment 2

[0127] see Figure 2l , the present invention also provides a graphene bionic photodetector based on temperature regulation performance, the graphene bionic photodetector based on temperature regulation performance is prepared by the preparation method in the first embodiment, and the temperature regulation based The graphene bionic photodetector of performance comprises: micro heater platform 1; Graphene 2, is positioned on described micro heater platform 1; Active thin film (not shown in the figure), is formed on the surface of described Graphene 2; Photoreceptor protein 4, formed on the active film.

[0128] As an example, the micro heater platform 1 includes sequentially from bottom to top:

[0129] a substrate 11, which includes a thermally-insulated cavity 17;

[0130] Composite film 12, located above the heat insulation cavity 17, includes a heating film area and a supporting beam area, and the supporting beam area connects the heating film area and the substrate 11; ...

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Abstract

The invention provides a temperature adjusting performance based graphene bionic light detector and a preparation method thereof. The preparation method comprises that 1) graphene and a micro heater platform are provided, and graphene is transferred to the micro heater platform; 2) a structured obtained in the step 1) is placed in a chemical vapor deposition reacting furnace for annealing; 3) thesurface of the graphene after annealing is modified via a reagent to form an active film with an active group; and 4) light accepter protein is formed in the surface of the active film. According to the invention, a suspension membrane type heating structure is connected to graphene, and the surface of the graphene is modified with the light accepter protein; the light accepter protein realizes wavelength selectivity, and the light absorptivity is improved; the suspension membrane type heating structure has less influence on the graphene performance; the working temperature is adjusted via theheating voltage; and thus, the mobility and concentration of photoproduced carriers are adjusted to improve the performance of the light detector.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and in particular relates to a graphene bionic photodetector based on temperature regulation performance and a manufacturing method thereof. Background technique [0002] Photodetectors are widely used in daily life and military fields, and photodetectors in different bands have different applications. The ultraviolet band is used to observe changes in the intensity of ultraviolet rays in the lower atmosphere on the ground, solar physics, and research on impending earthquake prediction; the visible or near-infrared band is used for ray measurement and detection, industrial automatic control, photometry, etc.; the infrared band is used for missile guidance, infrared thermal Imaging, infrared remote sensing, etc. Photodetectors in different wavelength bands are of great significance to different fields. [0003] Photoreceptor proteins are light-sensitive biomolecules that cover wa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/26C23C16/26
CPCG01D5/26C23C16/26
Inventor 李铁仝敬王伊张蕾高安然张东伟宋海峰王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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