Crystal cultivation process environment vibration influence quantitative and rapid assessment technology

Abstract

The invention discloses a crystal cultivation process environment vibration influence quantitative and rapid assessment method. The method comprises the steps that 1, the first three order vibration mode frequencies f1, f2 and f3 of a crystal cultivation structure are obtained; 2, a vibration response allowable target [R] of the crystal cultivation structure is determined according to process design of the crystal cultivation structure; 3, the environment vibration excellent frequency band center frequency fL is tested; 4, on the condition that the first two order vibration mode quality accumulation participation coefficient is larger than 80%, whether f3 / f1>10 and f3 / f2>10 are met or not is judged, and if yes, the step 5 is executed; 5, whether (f1-fL) / fL<0.05 is met or not is judged, andif yes, the step 6 is executed; 6, a single degree-of-freedom single particle power model response value RS, double degree-of-freedom single particle power model response values R[D, x] and R[D,y] are calculated, an x direction vector, a y direction vector and a maximum response value RD are judged, and the RS and the RD are compared to take the maximum value; 7, the maximum value in the RS and the RD is smaller than [R] or not is judged, and if yes, it is judged that the vibration environment does not affect crystal cultivation equipment.

Description

technical field [0001] The invention relates to the field of vibration control, in particular to a quantitative and rapid assessment method for the environmental vibration impact of a crystal cultivation process. Background technique [0002] At present, the evaluation methods for slender and high-flexible crystal cultivation equipment are mainly based on past engineering experience or a large number of calculations and model analysis. It cannot accurately reflect the actual engineering situation, and a large number of calculations and model analysis not only take a long time, but also cannot quickly and accurately assess the environmental impact. In summary, the traditional evaluation method has the following defects: [0003] Based on engineering experience, it cannot accurately reflect actual engineering. With the rapid development of cities, a large number of new industrial and civil buildings have increased, and the number and frequency of vehicle traffic have increas...

AI Technical Summary

Problems solved by technology

This technology is mainly aimed at the problem that the slender and highly flexible crystal cultivation equipment cannot be evaluated in real time when it is affected by environmental vibration for a long time and exceeds the standard, which leads to the problem of low yield rate in crystal cultivation. A method based on the dynamic characteristics of this type of structural system is proposed. Rapid Identification and Evaluation Method for Vibration Effects

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