Post-processing method of mask plates and mask plates

A technology of mask plate and convex part, which is applied to the post-processing method of mask plate and the field of mask plate, and can solve problems such as unfavorable application

Inactive Publication Date: 2018-07-27
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the blocking of the etched convex part, the second region 120' can only be evaporated once, which is a non-ideal film thickness region, which is not conducive to application

Method used

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  • Post-processing method of mask plates and mask plates
  • Post-processing method of mask plates and mask plates
  • Post-processing method of mask plates and mask plates

Examples

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Embodiment Construction

[0026] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0027] See Figure 2 to Figure 5 , the post-processing method of the mask plate of an embodiment, comprises the following steps:

[0028] S10 , providing a mask plate 100 , the surface of the mask plate 100 has a convex portion 120 .

[0029] Wherein, the surface of the mask 100 include...

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Abstract

The invention relates to a post-processing method of mask plates and the mask plates. The post-processing method of the mask plate comprises the following steps that the mask plates are provided, andthe surfaces of the mask plates are provided with raised parts; and at least a part of the raised parts are subjected to chemical grinding treatment. The post-processing method of the mask plates caneffectively remove or thin unanticipated and spare raised parts on the mask surfaces. The mask plates are manufactured and processed by the post-processing method of the mask plates, by reducing at least a part of the raised parts located on the side wall faces of the upper openings of the mask plates, the occlusion on evaporation source can be reduced, the effective area of evaporation can be increased, the reduction of the design margin is facilitated, the aperture opening ratio is increased, and the application of high PPI products is facilitated. In addition, burr and corner influence effects are further reduced.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method for post-processing a mask and the mask. Background technique [0002] Flat panel display devices have many advantages such as thin body, power saving, and no radiation, and have been widely used. Existing flat panel display devices mainly include active-matrix organic light emitting diodes (Active-matrix organic light emitting diode, AMOLED) and organic electroluminescent display devices (Organic Light Emitting Display, OLED). The manufacture of flat panel display devices involves the process of forming a thin film pattern on a substrate, that is, using a patterned evaporation mask to mask, and forming the required pattern on the substrate to be evaporated by vacuum evaporation. [0003] The traditional mask plate is made by double-sided etching process, please refer to figure 1 , several openings are formed in the manufactured mask 100', and each opening is formed b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/00
CPCC23C14/042C23C14/24H10K71/166
Inventor 刘明星李俊峰王徐亮高峰
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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