Surface plasma waveguide optical sensing device of graphene material

Abstract

The invention discloses a surface plasma waveguide optical sensing device of a graphene material. The surface plasma waveguide optical sensing device is characterized by comprising an array columnar resonant cavity and a saw-tooth-shaped long-strip waveguide structure, wherein one group of saw-tooth-shaped edges are symmetrically arranged at two side edges of the array columnar resonant cavity andthe saw-tooth-shaped long-strip waveguide structure; a semiconductor material graphene and a metal material, which are tightly connected with the array columnar resonant cavity and the saw-tooth-shaped long-strip waveguide structure, are symmetrically arranged at each of the two side edges of the array columnar resonant cavity and the saw-tooth-shaped long-strip waveguide structure respectively;a first-group cylindrical resonant cavity and a second-group cylindrical resonant cavity are symmetrically etched beside tooth top positions of saw teeth of the array columnar resonant cavity and thesaw-tooth-shaped long-strip waveguide structure, which are tightly connected with the metal material and the semiconductor material graphene. The optical sensing device disclosed by the invention hasthe characteristics of good adjustability and strong anti-interference capability.

Description

technical field [0001] The invention relates to the field of optical measurement, in particular to a surface plasmon waveguide optical sensing device of a graphene material. Background technique [0002] Surface Plasmon Resonance (SPR) sensing technology is a very active field of engineering technology research, and it is a research on the intersection of information science, life science and nanotechnology. SPR is a phenomenon of collective oscillation of free electrons at the interface between the metal thin film and the medium due to the excitation of evanescent waves. With the rapid improvement of micro-nano processing technology, semiconductor devices represented by graphene have become a popular direction of integrated photonics. [0003] Typically, "Advance Materials" reported "Structurally Well-Defined Au@Cu2−xS Core–Shell Nanocrystals for Improved Cancer Treatment Based on Enhanced Photothermal Efficiency" in 2016, and Zhang Jiatao of Beijing Institute of Technolog...

AI Technical Summary

Problems solved by technology

Although the performance of the SPR sensor produced by the above research design is good, the problems of anti-interference and stability of the chemical sensor have caused some troubles to it.

[0004] Through search and novelty search, it is found that most of the surface plasmon waveguides of graphene materials are currently concentrated in the research of characteristics, and there are few designs for the combination of engineering technology in optical sensing and other aspects.

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