Mask plate

Abstract

The embodiment of the invention provides a mask plate. The mask plate comprises a mask plate body, wherein open holes are formed in the mask plate body; preset evaporation design graphics are formed on a substrate to be evaporated by an evaporation technology through the open holes; and the open holes are bigger than the preset evaporation design graphics. According to the mask plate, the size ofthe open holes in the mask plate body is adjusted until the open holes in the mask plate body are able to adapt to the deformation of the mask plate in the evaporation process based on the positions in which the preset evaporation design graphics are formed on the substrate to be evaporated, thus the difference of outer shadow effect surrounding a display panel is effectively reduced, and the consistency of the boundary size of film layers surrounding the display panel is ensured.

Description

technical field [0001] The present invention relates to the technical field of display device manufacturing, in particular to a mask plate. Background technique [0002] In the manufacturing process of an organic light-emitting diode (Organic Light-Emitting Diode, OLED), it is usually necessary to adopt an evaporation process to form an OLED device. The evaporation process is actually one of the physical vapor deposition (Physical VaporDeposition, PVD) processes, which refers to the evaporation of substances by heat, and the controllable transfer of atoms or molecules from the source material to the film without involving chemical reactions. Preparation. Specifically, see figure 1 As shown, during the evaporation process, the substance is heated by the evaporation source 1 in a high-vacuum chamber environment to form an evaporation material, and the evaporated evaporation material is deposited on the substrate through the corresponding openings on the mask plate 2 3, a th...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the technical solution of the present invention is to provide a mask, which is used to solve the problem of the outer shadow effect caused by the outer shadow effect when the material is evaporated in the prior art. Compared with the opening area of ​​the mask, the different boundaries of the evaporation pattern on the substrate The range of outward expansion is different, resulting in the problem of the difference in the boundary size of the film layer around the display panel.

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