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Hot isostatic pressure treatment method for chromium plane target material

A technology of hot isostatic pressing and treatment method, which is applied in the direction of metal material coating process, ion implantation plating, coating, etc., can solve the problems of low material strength and rigidity, workpiece deformation, bending, etc., to improve quality and reduce Side bending and deformation, the effect of low deformation

Active Publication Date: 2018-08-31
东莞市欧莱溅射靶材有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the high temperature and high pressure environment of hot isostatic pressing, the strength and stiffness of most materials are reduced to extremely low values. Therefore, in hot isostatic pressing, there are serious workpiece deformation and scrapping caused by bending.

Method used

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  • Hot isostatic pressure treatment method for chromium plane target material
  • Hot isostatic pressure treatment method for chromium plane target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Chromium planar target hot isostatic pressing treatment method, figure 1 shown, including the following steps:

[0033] S1: Select a hot isostatic pressing furnace in which the furnace chamber 1 is larger than the target workpiece 3;

[0034] S2: place the target workpiece 3 vertically or horizontally in the furnace chamber 1, and leave a flow gap 4 between the target workpiece 3 and each inner wall of the furnace chamber 1, and leave a flow space above the target workpiece 3 ;

[0035] S3: Fill the furnace cavity 1 with ceramic beads 2, and the ceramic beads 2 fill the flow gap 4. The ceramic beads are ceramic beads 2 with a diameter of 6-10 mm, and ceramic beads 2 with a fluid spherical shape are selected. Ceramic beads 2 The diameter of the flow gap 4 is less than 0.5 times; the flow gap 4 is filled with at least 3 to 20 ceramic beads 2 in the width direction; preferably, the flow gap 4 is filled with at least 10 to 15 ceramic beads 2 in the width direction;

[00...

Embodiment 2

[0041] Chromium planar target hot isostatic pressing treatment method, figure 2 shown, including the following steps:

[0042] S1: Select a hot isostatic pressing furnace in which the furnace chamber 1 is larger than the target workpiece 3;

[0043] S2: Put ceramic beads 2 at the bottom of the furnace cavity 1 first, choose ceramic beads 2 with a diameter of 6-10 mm, and choose ceramic beads 2 in the shape of a fluid sphere to form a ceramic bead flow supporting layer 6 , and then place the target workpiece 3 on the ceramic bead flow supporting layer 6, and leave a flow gap 4 between the periphery of the target workpiece 3 and the inner wall of the furnace chamber 1. The ceramic bead flow support layer 6 is filled with at least 10-50 ceramic beads 2 in the height direction, preferably, the ceramic bead flow support layer 6 is filled with at least 20-30 ceramic beads 2 in the height direction.

[0044] Then place the target workpiece 3 vertically or horizontally in the furna...

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Abstract

The invention relates to a hot isostatic pressure treatment method for chromium plane target material, which is characterized in that: sphere ceramic beads with fluidity are filled into a furnace chamber; a ceramic bead flow gland layer is formed above a target material work piece; and a hot isostatic pressure treatment is carried out by staring a hot isostatic pressure furnace. The ceramic beadsautomatically fill the voids generated by the thermal deformation of the target material work piece and the free of thermal deformation of the ceramic beads. The ceramic beads in the ceramic bead flowgland layer flow under the action of self-gravity and are filled in the flow voids, so that the ceramic beads are subjected to static pressure action of ceramic beads in each direction and the targetmaterial work piece is subjected to substantially the same static pressure in each direction. The target material work piece and the ceramic bead are naturally cooled in the furnace chamber after thehot isostatic pressure treatment is finished to obtain a finished product. According to the invention, under high temperature, by using the small deformation and fluidity of ceramic beads, the hot isostatic pressure treatment method reduces the thermal deformation of the target material work piece to the minimum. The lateral bending and the deformation are reduced, the quality of the product is improved, the scrap of the material is reduced, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of target heat treatment, in particular to a hot isostatic pressing treatment method for reducing the side bending of a chromium ingot and reducing the deformation of a chromium plane target. Background technique [0002] Chromium planar targets have a wide range of uses. Currently, chrome planar targets are mostly produced by spraying. As the market’s requirements for product quality increase, the disadvantage of low density of sprayed targets gradually becomes apparent. The hot isostatic pressing process has many advantages. Around the hot isostatic pressing, some technologies to improve yield and reduce defects have gradually developed. [0003] In the high temperature and high pressure environment of hot isostatic pressing, the strength and stiffness of most materials are reduced to extremely low values. Therefore, in hot isostatic pressing, there are serious workpiece deformation and scrapping caused by...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/15
CPCC23C14/3414B22F3/15
Inventor 张中美
Owner 东莞市欧莱溅射靶材有限公司
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