Micro-machining tool rest with force servo function
A technology of micromachining and tool holder, which is applied in the direction of nanostructure manufacturing, nanostructure testing, nanotechnology, etc., can solve the problems of small force, low processing efficiency, processing capacity and workpiece material limitations, so as to reduce the deflection angle, The effect of strong processing ability and wide adaptability
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[0035] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.
[0036] The micromachining tool post with force servo function provided by the present invention includes two parts: a mechanical system and a control system.
[0037] Such as figure 1 , 5 -8, the mechanical system includes a PZT actuator 10, a first displacement sensor 1, a second displacement sensor 4, a screw 2, a nut 3, a rotating ring 6, a flexible hinge 5, a probe 9, and a guide bracket 8 And XY displacement platform 11. in:
[0038] Described guiding support 8 is inverted " T " type, is made of horizontal support and vertical support, and the...
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