Waveguide grating filter and manufacturing method thereof

Abstract

The invention provides a waveguide grating filter. The waveguide grating filter comprises a substrate (1) and a waveguide (2), and further comprises a beam column structure (3) used for supporting thewaveguide (2), wherein the beam column structure (3) comprises column structures (302) and a beam structure (301); the column structures (302) are positioned on two sides of the waveguide (2) and arranged on the substrate (1); the beam structure (301) is used for connecting the column structures (302); an air gap (201) is formed between the waveguide (2) and the substrate (1). According to the waveguide grating filter disclosed by the invention, spectral characteristics of the waveguide grating filter are changed by adopting a thermal tuning method, a local thermal isolation structure betweenthe waveguide and the substrate is realized by forming the air gap below the waveguide, and vertical mobility of the heat is obstructed, so that the power consumption of the waveguide grating filteris reduced. The waveguide grating filter disclosed by the invention has the advantages of being low in power consumption, high in tuning efficiency, fast in tuning, stable in structure, easy to integrate and the like, and has obvious application value in a wavelength division multiplexing system.

Description

【Technical field】 [0001] The invention belongs to the technical field of optical filtering, relates to the technical field of integrated optical waveguide devices, in particular to a waveguide grating filter and a manufacturing method thereof. 【Background technique】 [0002] Optical filter is an important photonic device, which is mainly used in the integrated optical circuit where the silicon-on-insulator (SOI) substrate is the optical platform. The main function of the optical filter is to frequency-separate the light containing multiple frequency components to obtain one or more frequency components. In the framework of optical communication systems, filters mainly include Fabry-Perot (F-P) filters, Mach-Zehnder (MZ) filters, grating filters, and microring filters. Compared with the other three structures, the grating filter has the advantages of simple fabrication and easy design of spectral characteristics, and has received extensive attention. [0003] Tunable wavegu...

AI Technical Summary

Problems solved by technology

However, there are two problems with this structure: one is to increase the tuning response time (about hundreds of microseconds), that is, to reduce the response speed; the other is that the waveguide grating filter with the air gap structure is not good The supporting structure, the waveguide will produce large deformation, which greatly reduces the stability of the mechanical mechanism

In summary, the current silicon-based thermally tunable waveguide grating filters generally have low tuning efficiency, slow response speed, and poor structural stability.

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