Ceramic laminate, ceramic insulating substrate, and method for manufacturing ceramic laminate

A manufacturing method and laminated body technology, applied in the direction of semiconductor devices, electrical solid devices, semiconductor/solid device components, etc., can solve the problems of limited toughness, unknown characteristics, ceramic layer fracture, etc., and achieve high electrical durability , Excellent thermal fatigue resistance, and the effect of increasing the electric field value of insulation breakdown

Active Publication Date: 2020-05-26
NIPPON STEEL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] Since these bonding methods are bonded at a temperature between 800°C and 1080°C, there are the following problems: thermal stress is generated due to the difference in thermal expansion coefficient between the ceramic layer and the metal layer, and the residual stress is added to the thermal stress caused by the ceramic layer. The thermal stress caused by the process of inserting the insulating substrate into the semiconductor or peripheral equipment and repeated thermal cycles during use causes the ceramic layer to break
Therefore, alumina-zirconia ceramics are expected to be paralleled with silicon nitride, but as mentioned above, there are restrictions on the control of the particle size, shape, dispersion state, and crystal structure of alumina-zirconia ceramics produced by the sintering method. , with limited toughening
On the other hand, the production method using the aerosol deposition method has not yet been established, and the characteristics are completely unknown
The general ceramic layer produced by the aerosol deposition method is difficult to thicken compared with the sintered ceramic plate, and although it is advantageous in terms of heat dissipation, it needs to be further improved in terms of mechanical properties

Method used

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  • Ceramic laminate, ceramic insulating substrate, and method for manufacturing ceramic laminate
  • Ceramic laminate, ceramic insulating substrate, and method for manufacturing ceramic laminate
  • Ceramic laminate, ceramic insulating substrate, and method for manufacturing ceramic laminate

Examples

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Embodiment 1

[0114] Hereinafter, although this invention is demonstrated in detail based on this Example, this is an example which shows this invention, and this invention is not limited at all by an Example.

[0115] (Example 1)

[0116] Here, as Example 1, a ceramic laminate in which a composite ceramic layer made of alumina-zirconia was formed on a copper base material layer using an aerosol deposition method was prepared. In addition, an alumina-zirconia sintered body produced by a general sintering method was prepared as Comparative Example 1. Then, for the above-mentioned Example 1, by comparing it with Comparative Example 1, the characteristics of the structure and the characteristics of the mechanical properties were investigated.

[0117] As a result of careful research, the alumina raw material powder and zirconia raw material powder used were α-Al with a purity of 99.5% by mass, a median particle size of 0.73 μm, and a maximum diameter of 6.7 μm. 2 o 3 The zirconia raw materi...

Embodiment 2

[0155] Using two kinds of raw materials, alumina-zirconia ceramics mainly composed of zirconia were produced as a trial. One is a material obtained by mixing commercially available alumina powder and zirconia powder by aerosol deposition (sample 3) and a commercially available alumina-zirconia mixed powder as a raw material A material obtained by forming a film by an aerosol deposition method (sample 4).

[0156] Both raw materials mainly contain zirconia containing 20% ​​by mass of alumina, and contain yttrium oxide for stabilization of zirconia.

[0157] The raw material powders of Sample 3 were the alumina powder and partially stabilized zirconia fused powder used in Example 1. The zirconia fused powder is partially stabilized powder, and contains 5.5% by mass of yttrium oxide relative to zirconia. The central particle size (median particle size) was 3.5 μm. The zirconia and alumina were weighed so that the zirconia became 20% by mass, put into a ball mill bowl made of T...

Embodiment 3

[0170] Using zirconia with different compositions and crystal structures, alumina-zirconia ceramic laminates were produced, and the mechanical and electrical properties were evaluated.

[0171]The raw material powder of Sample 5 was an alumina-zirconia mixed powder having a zirconia content of 12% by mass. The mixing of the raw material mixed powder utilizes a ball mill. The alumina used as the raw material was the same as that used in Example 1. In addition, zirconium oxide is an electro-fused powder that does not contain stabilizing elements with the same composition and impurity amount as in Example 1, but a finely pulverized powder with a median particle size of 1.1 μm and a maximum diameter of 11 μm is used. commercially available.

[0172] These raw material powders were weighed so that the content of zirconia would be 12% by mass and the content of alumina would be 88% by mass. Put into a resin bowl together with alumina balls with a diameter of 10 mm and a purity of...

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Abstract

To provide a ceramic laminate, a ceramic insulating substrate, and a ceramic laminate having improved mechanical properties of a composite ceramic layer having excellent thermal fatigue resistance, thermal conductivity, and insulation, and having excellent durability, heat dissipation, and insulation Body manufacturing method. In the cross section perpendicular to the joint surface, the average diameter of the second phase particles (3) is 0.02 μm to 0.3 μm, and the major axis and minor axis of the equivalent ellipse when the second phase particles (3) are regarded as ellipses The average value of the ratio is set to 2-10. Furthermore, it is characterized in that 60% or more of the second phase particles (3) have an orientation angle of 30° or less, and the average orientation angle is 5° to 35°.

Description

technical field [0001] The invention relates to aluminum oxide-zirconia (Al 2 o 3 -ZrO 2 ) and a ceramic laminate in which a composite ceramic layer and a substrate layer are bonded together and a method for producing the same. In particular, it relates to a ceramic insulating substrate used in a power semiconductor device that handles relatively high current and voltage, and a transfer roller whose surface requires high mechanical properties such as wear resistance. Background technique [0002] In order to have excellent strength, fracture toughness, wear resistance, thermal conductivity, heat dissipation, and insulation, ceramic laminates coated or bonded with ceramics are used as structural materials such as rolling, conveying rollers, and furnace walls, or ceramic insulation. Functional materials such as circuit boards are used in various fields. The ceramics used vary depending on the application. In order to obtain high characteristics for each application, alumin...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): C23C24/04H01L23/15
CPCC23C24/04H01L23/15
Inventor木村圭一德桥惠祐宇野智裕佐藤裕
OwnerNIPPON STEEL CORP