Dichroic mirror array
A technology of dichroic mirror array and dichroic mirror, which is applied to condenser mirror, color measuring device, color/spectral characteristic measurement, etc., can solve the problems of description and the quantity not being disclosed, and achieves low cost of device size , the effect of miniaturization of device size
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Embodiment 1
[0091] image 3 It is a figure showing the result of calculating the parallel beam of the maximum width which can be divided in the example of the dichroic mirror array which divides the beam which enters a dichroic mirror array in parallel in the vertical direction. image 3 It is a schematic cross-sectional diagram of a dichroic mirror array based on a plane expanded by the arrangement axis and the emission axis. light beams along the emission axis direction, and enter the two-dimensional sensor 30 in parallel.
[0092] Dichroic mirrors 17, 18, 19, and 20 are all α=5mm in width, thickness is β=1mm, and image 3 Quartz substrate (refractive index n 0 =1.46) on the lower right side (the positive direction of the emission axis) (the surface of α×β) formed by forming a multi-layer film or a single-layer film. Here, the transmitted light of the dichroic mirror 20 is not shown. In addition, an antireflection film for reducing reflection loss is formed on the upper left (positi...
Embodiment 2
[0114] In Embodiment 1, the expansion of the opening width W and the reduction of the optical path length L are achieved by adjusting the interval x, the step difference y, and z of a plurality of dichroic mirrors. In this embodiment, the following solution is proposed: in the case of no need to arrange the step difference (y=z=0), that is, even if a plurality of dichroic mirrors are arranged on the same plane, more specifically, even if the dichroic mirrors are arranged The ends of the dichroic mirrors in the direction of the emission axis are arranged on the same plane, and the expansion of the opening width W and the reduction of the optical path length L can also be realized.
[0115] Example 1 Figure 5 is theta 0 = 45°, the result will be set to θ 0 =50°The results are expressed in Figure 9 . other conditions in Figure 5 and Figure 9 In any case, the lower ends of the dichroic mirrors 17 to 20 are arranged on the same plane. Nevertheless, it can be seen that th...
Embodiment 3
[0133] Dichroic mirror arrays are used as objects of light beams that are seldom completely parallel beams, and are mostly non-parallel beams. That is, the diameter of the beam is not constant as the beam travels (optical path length), but shrinks and expands. Therefore, in the above-mentioned embodiments, the structure of the dichroic mirror array that allows both the reduction of the optical path length and the expansion of the aperture width is proposed so as to be able to cope with various light beams. In the present embodiment, the light beam as the object is specifically defined, and it is examined whether a dichroic mirror array can support it.
[0134] Figure 11 Define concrete examples of beams. Such as Figure 11 As shown in (a), the light from the luminous point 1 with a diameter d is converged by a condenser lens 2 with a focal length f and an effective diameter D, and an image is formed at a position with an optical distance g from the condenser 2 to obtain a ...
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