Evaporation device and evaporation method
A technology of evaporation and evaporation source, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of low evaporation efficiency of evaporation device, etc. The effect of plating efficiency
Active Publication Date: 2020-04-21
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] Embodiments of the present invention provide a vapor deposition device and a vapor deposition method, which can solve the problem of low vapor deposition efficiency of the vapor deposition device in the related art
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Embodiment Construction
[0040] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0041] figure 1 It is a schematic structural diagram of an evaporation chamber in the related art, such as figure 1 As shown, the evaporation device is set in the evaporation chamber 1, and the evaporation device includes: an evaporation base 101, an evaporation source base 102, a heating assembly and an evaporation source cluster. The evaporation source cluster is fixedly arranged on the evaporation source base 102, and includes three evaporation sources 103 in the evaporation source cluster, and each evaporation source 103 includes: an evaporation crucible 1031 and an evaporation crucible 1031 outlet The nozzle 1032 at the position, and the effective evaporation areas of the three evaporation sources 103 overlap at the same time. E...
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The invention discloses an evaporation device and an evaporation method and belongs to the field of display. The evaporation device comprises an evaporation base table, an evaporation source base table, a moving component and at least two sets of evaporation sources. Each set of evaporation sources comprises at least one evaporation source. The evaporation base table is used for fixing a substrateto be evaporated. The moving component is fixedly connected to the evaporation source base table, and the moving component is used for driving the evaporation source base table to move from one end of the substrate to be evaporated to the other end of the substrate to be evaporated. The at least two sets of evaporation sources are sequentially fixedly arranged on the side, close to the evaporation base table, of the evaporation source base table in the moving direction of the evaporation source base table, the effective evaporation areas of the at least two sets of evaporation sources at thesame time do not overlap, and each set of evaporation sources is used for forming an evaporation film layer during the evaporation process. By the adoption of the evaporation device and the evaporation method, the evaporation efficiency of the evaporation device is improved effectively; and the evaporation device and the evaporation method are used for manufacturing film layers in display panels.
Description
technical field [0001] The invention relates to the display field, in particular to an evaporation device and an evaporation method. Background technique [0002] During the preparation process of the organic light-emitting diode (English: Organic Light-Emitting Diode; abbreviation: OLED) display panel, the evaporation method is often used to prepare the film layer. [0003] In the related art, the evaporation device generally includes a plurality of evaporation sources, and each evaporation source includes an evaporation crucible and a nozzle arranged at the outlet of the evaporation crucible. The principle of the evaporation method is: the evaporation source material is placed in the evaporation crucible, and the evaporation source material is heated by means of resistance heating or electron beam heating, so that the evaporation source material is converted from a liquid or solid state to a gaseous state, and The gaseous evaporation source material is sprayed onto the su...
Claims
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IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 贾文斌孙力施槐庭
Owner BOE TECH GRP CO LTD