Electronic/ion induced desorption yield integral test device and method

A test device and ion technology, applied in the direction of analyzing materials and instruments, can solve the problems of single test function, single incident electron source, no test equipment, etc., and achieve the effect of improving the test temperature zone

Inactive Publication Date: 2018-11-06
XI AN JIAOTONG UNIV +1
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Problems solved by technology

The in-situ test device requires some specific environments and conditions, such as the accelerator beam environment, because different accelerator beam parameters and beam types are not the same, which limits the application range of the electron/ion-induced desorption yield test device
However, the independent electron/ion-i...

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  • Electronic/ion induced desorption yield integral test device and method
  • Electronic/ion induced desorption yield integral test device and method
  • Electronic/ion induced desorption yield integral test device and method

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Embodiment Construction

[0033] The present invention is described in further detail below in conjunction with accompanying drawing:

[0034] refer to figure 1 and figure 2 , the electronic / ion-induced desorption yield integrated test device of the present invention includes a standard vacuum chamber 21, a vacuum test chamber 4, an electron source / ion source 2, an ion pump 10, a roughing pump 14, and a second turbomolecular pump 6. The first turbomolecular pump 3. A high-purity standard gas source 7. A pressure test system for detecting the pressure in the vacuum test chamber 4. A diaphragm vacuum gauge 19 for detecting the vacuum degree in the standard vacuum chamber 21. Low temperature sensor 20 and high temperature normal temperature sensor 23 for detecting the temperature of sample 17, heating plate 22 and heating control system 24 for heating sample 17, and refrigeration system 25 for cooling sample 17; The pump 6 and the high-purity standard gas source 7 are connected to the inlet of the stan...

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Abstract

The invention discloses an electronic/ion induced desorption yield integral test device and method. The device comprises a standard vacuum chamber, a vacuum test cavity, an electronic source/ion source, an ion pump, a roughing pump, a second turbine molecular pump, a first turbine molecular pump, a high-purity standard gas input pipeline, a pressure intensity test system, a diaphragm type vacuum gauge, a temperature sensor, a refrigerating system and a heating disc; the second turbine molecular pump and the high-purity standard gas source input pipeline are communicated with an inlet of the standard vacuum chamber; an outlet of the standard vacuum chamber is communicated with the vacuum test cavity; a sample support frame for placing samples is arranged in the vacuum test cavity; the electronic source/ion source directly faces to the samples on the sample support frame; the ion pump, the roughing pump and the first turbine molecular pump are respectively communicated with the vacuum test cavity. The device and the method have the advantages that the electronic induced desorption yield test and ion induced desorption yield test can be realized; the test temperature region range is wide.

Description

technical field [0001] The invention relates to an electron / ion-induced desorption yield test device and method, in particular to an electron / ion-induced desorption yield integrated test device and method. Background technique [0002] Electron / ion-induced desorption yield testing devices are used in the field of particle accelerators, commercial production of superconducting cyclotron proton therapy instruments, geophysics, high power microwave (High Power Microwave, HPM) and pulsed power devices (Pulsed Power Devices, PPD ) fields have very important application value. Electron / ion-induced desorption yield test results are important for the design and optimization of the vacuum system of a new generation of high-energy, high-intensity, and high-brightness particle colliders, the optimization and cost control of the vacuum system of superconducting cyclotron proton therapy instruments, and the quasi-capture plasma region in geophysics It is of great reference significance ...

Claims

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Application Information

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IPC IPC(8): G01N7/14
CPCG01N7/14
Inventor 王洁王盛高勇王锦东
Owner XI AN JIAOTONG UNIV
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