Electronic/ion induced desorption yield integral test device and method

Abstract

The invention discloses an electronic / ion induced desorption yield integral test device and method. The device comprises a standard vacuum chamber, a vacuum test cavity, an electronic source / ion source, an ion pump, a roughing pump, a second turbine molecular pump, a first turbine molecular pump, a high-purity standard gas input pipeline, a pressure intensity test system, a diaphragm type vacuum gauge, a temperature sensor, a refrigerating system and a heating disc; the second turbine molecular pump and the high-purity standard gas source input pipeline are communicated with an inlet of the standard vacuum chamber; an outlet of the standard vacuum chamber is communicated with the vacuum test cavity; a sample support frame for placing samples is arranged in the vacuum test cavity; the electronic source / ion source directly faces to the samples on the sample support frame; the ion pump, the roughing pump and the first turbine molecular pump are respectively communicated with the vacuum test cavity. The device and the method have the advantages that the electronic induced desorption yield test and ion induced desorption yield test can be realized; the test temperature region range is wide.

Description

technical field [0001] The invention relates to an electron / ion-induced desorption yield test device and method, in particular to an electron / ion-induced desorption yield integrated test device and method. Background technique [0002] Electron / ion-induced desorption yield testing devices are used in the field of particle accelerators, commercial production of superconducting cyclotron proton therapy instruments, geophysics, high power microwave (High Power Microwave, HPM) and pulsed power devices (Pulsed Power Devices, PPD ) fields have very important application value. Electron / ion-induced desorption yield test results are important for the design and optimization of the vacuum system of a new generation of high-energy, high-intensity, and high-brightness particle colliders, the optimization and cost control of the vacuum system of superconducting cyclotron proton therapy instruments, and the quasi-capture plasma region in geophysics It is of great reference significance ...

AI Technical Summary

Problems solved by technology

The in-situ test device requires some specific environments and conditions, such as the accelerator beam environment, because different accelerator beam parameters and beam types are not the same, which limits the application range of the electron / ion-induced desorption yield test device

However, the independent electron / ion-induced desorption yield test device currently has no special test equipment, and the test function is single, such as only used in the normal temperature zone and low temperature zone or normal temperature zone and high temperature zone), the incident electron source is single, and only electrons are used. source or ion source only

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