Piezoelectric vibration excitation self-diagnosis MEMS (Micro Electro Mechanical System) accelerometer core and accelerometer

Abstract

The invention discloses a piezoelectric vibration excitation self-diagnosis MEMS (Micro Electro Mechanical System) accelerometer core and an accelerometer. The accelerometer core comprises an upper electrode plate, an intermediate electrode plate, a lower electrode plate and a vibration table; the intermediate electrode plate is positioned between the upper electrode plate and the lower electrodeplate and is connected to a fixed position through a cantilever beam; the upper electrode plate and the intermediate electrode plate form a first capacitor; the lower electrode plate and the intermediate electrode plate forms a second capacitor; the first capacitor and the second capacitor form a pair of differential capacitors; the vibration table comprises a feedback layer and a vibration layer,the feedback layer is positioned on the lower side of the lower electrode plate, and the vibration layer is positioned on the lower side of the feedback layer; a feedback output positive electrode and a feedback output negative electrode are led out from the surface of the feedback layer. With the adoption of the accelerometer core and the accelerometer, the detection on the vibration amplitude of the vibration layer can be realized.

Description

technical field [0001] The invention relates to the technical field of multilayer piezoelectric ceramic preparation technology, in particular to a piezoelectric vibration excitation self-diagnosing MEMS accelerometer core. Background technique [0002] MEMS (Micro Electro-Mechanical System) accelerometer is one of the important sensors in the micro-miniature inertial navigation system. With the characteristics of small size, low cost, light weight and low power consumption, it has been widely used in short-range guidance, integrated navigation, attitude control, civilian vehicles and consumer electronics markets of modern military equipment. [0003] MEMS accelerometers are affected by factors such as ambient temperature, air pressure, mechanical coupling, residual stress release, mechanical / thermal stress of the watch core, etc., resulting in poor long-term stability, and after installation, the health status of the accelerometer cannot be monitored in real time diagnosis....

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to provide a piezoelectric vibration excitation self-diagnosis MEMS accelerometer core and accelerometer, which solves the problems of motion coupling between the micro-vibration table and the sensitive structure, difficult processing, poor environmental adaptability, and poor reliability, and realizes Miniaturized, high-integrated, wide-band, multi-parameter, high-speed real-time health status self-diagnosis detection of MEMS accelerometer

Images