Piezoelectric vibration excitation self-diagnosis MEMS (Micro Electro Mechanical System) accelerometer core and accelerometer
An accelerometer and piezoelectric vibration technology, applied in the direction of speed/acceleration/shock measurement, acceleration measurement using inertial force, testing/calibration of speed/acceleration/shock measurement equipment, etc., can solve the problems of poor reliability, difficult processing, Problems such as poor environmental adaptability, to achieve the effect of detection
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[0030] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0031] In order to make the above objectives, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0032] figure 1 It is a schematic diagram of a piezoelectric vibration excitation self-diagnostic MEMS accelerometer watch core according to an embodiment of the present invention....
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