A kind of high-power vertical LED epitaxial structure and its preparation method

A vertical structure and epitaxial structure technology, applied in semiconductor devices, electrical components, nanotechnology, etc., can solve the problems of ohmic contact electrode difficulties, optical and electrical performance limitations, low carrier concentration, etc., to achieve enhanced current expansion, Improving the photoelectric performance and wide application effect
CN108807627BActive Publication Date: 2021-01-22HEYUAN CHOICORE PHOTOELECTRIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HEYUAN CHOICORE PHOTOELECTRIC TECH CO LTD
Publication Date
2021-01-22

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Abstract

The invention discloses a large-power vertical structure LED epitaxial structure. The large-power vertical structure LED epitaxial structure includes a pre-paved Al layer, an AlN buffer layer, an AlGaN buffer layer, a u-type GaN layer, a first graphene layer, an n-type GaN layer, a multi-quantum well, a p-type GaN layer, and a second graphene layer, wherein all the above layers and the multi-quantum well are grown on an Si substrate; and the first graphene layer and the second graphene layer are formed by vapor deposition. The large-power vertical structure LED epitaxial structure has better photoelectric performance and has wide application.
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Description

technical field

[0001] The invention relates to the field of epitaxial films of photoelectric devices with low-dimensional graphene-enhanced electrical conductivity, in particular to a high-power vertical structure LED epitaxial structure and a preparation method thereof. Background technique

[0002] Light-emitting diode (LED) is a semiconductor light-emitting device based on the principle of P-N junction electroluminescence. It has the advantages of high electro-optical conversion efficiency, energy saving, environmental protection, long life, and small size. It is known as the green light source of the 21st century. . LEDs have a wide range of applications and have been used as signal indicators, automotive headlights, LCD backlights, road lighting, indoor lighting, commercial lighting, stadium lighting, medical lighting, and biological lighting. If LEDs can be applied to traditional lighting on a large scale, it will have a very significant energy-saving effect, which i...

Claims

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