Predictive maintenance and health management method of semiconductor manufacturing device

Abstract

The invention relates to the field of intelligent maintenance of semiconductor manufacturing, and discloses a predictive maintenance and health management method of a semiconductor manufacturing device. A modeling strategy module, a model training module and a fault prediction module are contained, the modeling strategy module determines a key component and a modeling strategy of the device, the model training module only uses health state data to train the model of the key component, and the fault prediction module updates the model according to real-time data and predicts a key fault type inreal time; and the modeling strategy module outputs the key component that needs predictive maintenance, and the key failure mode that should be used as a predictive maintenance target to serve as the inputs of the model training module, the model training module trains the model of the key fault of the selected key component, and finally the fault prediction module establishes a model growth system to perform fault prediction.

Description

technical field [0001] The invention relates to the field of intelligent maintenance of semiconductor manufacturing, in particular to a method for predictive maintenance and health management of semiconductor manufacturing equipment. Background technique [0002] Currently, in order to ensure a high yield rate of semiconductor products, maintenance in the semiconductor manufacturing industry generally relies on a time-based preventive maintenance strategy (PM). Although a successful preventive maintenance strategy can effectively ensure a high level of equipment utilization, its shortcomings are also obvious, especially in the context of the semiconductor industry where product designs are becoming more and more complex and equipment is becoming more and more expensive. One of its disadvantages is the high cost of preventive maintenance. A preventive maintenance strategy reduces maintenance intervals to significantly less than the mean time between failures (MTBF) in order ...

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Problems solved by technology

[0009] In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present invention is to establish a systematic fault prediction and health management methodology, define the method of algorithm selection and monitoring level definition, and establish a growth-type Failure Prediction Model

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