Unlock instant, AI-driven research and patent intelligence for your innovation.

A kind of preparation method of planar composite heater

A heater and plane technology, applied in the direction of heating element materials, etc., can solve the problems of heater scrapping, falling off, cracking, etc.

Active Publication Date: 2021-05-14
山东国晶新材料有限公司
View PDF12 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the heater has good heating efficiency, it has been found in long-term application that layers, separation, peeling, and cracking between the pyrolytic graphite and the first outer coating of boron nitride or aluminum nitride are easy to cause the heater to be scrapped directly

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of preparation method of planar composite heater
  • A kind of preparation method of planar composite heater
  • A kind of preparation method of planar composite heater

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] A preparation method of a planar composite heater, comprising the steps of:

[0035] (1) The graphite flat plate is a circular flat plate with a diameter of 50mm. The graphite flat plate is used as the substrate, and the surface of the substrate is treated with 1000-mesh sandpaper to make the roughness of the substrate surface 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 2:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 40 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 200 mesh sandpaper, and the surface roughness of the substrate is Ra: 4.0 microns;

[0036] (2) Hang the pyrolytic boron nitride substrate treated in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise at 1400°C, and control the pressure in the reaction furnace at 300Pa; use inert gas as Carrier gas, methane is passed into th...

Embodiment 2

[0040] A preparation method of a planar composite heater, comprising the steps of:

[0041] (1) The graphite flat plate is a circular flat plate with a diameter of 100mm. With the graphite flat plate as the substrate, the surface of the substrate is treated with 2000-mesh sandpaper to make the roughness of the substrate surface 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 3:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 60 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 300 mesh sandpaper, and the surface roughness of the substrate is Ra: 3.0 microns;

[0042] (2) Suspend the treated pyrolytic boron nitride substrate in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise to 1500°C, and control the pressure in the reaction furnace at 400Pa; use inert gas as Carrier gas, methane is passed into the r...

Embodiment 3

[0046] A preparation method of a planar composite heater, comprising the steps of:

[0047] (1) The graphite flat plate is a circular flat plate with a diameter of 150 mm. The graphite flat plate is used as the substrate, and the surface of the substrate is treated with 3000 mesh sandpaper to make the surface roughness of the substrate 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 5:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 80 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 500-grit sandpaper, and the surface roughness of the substrate is Ra: 1.0 microns;

[0048] (2) Suspend the treated pyrolytic boron nitride substrate in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise to 1700°C, and control the pressure in the reaction furnace at 500Pa; use inert gas as Carrier gas, methane is passed in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention relates to a preparation method of a planar composite heater. The preparation method comprises: (1) the substrate of the planar heater is a pyrolytic boron nitride substrate, and the surface of the pyrolytic boron nitride substrate is polished until the surface roughness of the substrate is Ra: 0.5-4.0 microns; then coat a layer of pyrolytic graphite coating with a thickness of 10-300 μm. During the coating process, the temperature is controlled at 1200-1700 ° C, the pressure is 100-1000 Pa, and the surface is processed with patterns. Basically put it into the CVD reaction furnace again, coat a layer of pyrolytic boron nitride coating with a thickness of 10-300 μm, and cool it to obtain a planar composite heater. The planar composite heater prepared by the present invention can continuously raise and lower the temperature within 1500°C for 400-600 times without delamination or delamination, effectively improving the service life of the heater, and maintaining the heating efficiency above 90%, and the heating uniformity It can be controlled within 10°C.

Description

technical field [0001] The invention relates to a preparation method of a planar composite heater, which belongs to the technical field of heater preparation. Background technique [0002] The new material market is in a period of rapid growth. Heating devices are used in the preparation process of many new materials. The market demand for heaters is also increasing, and the requirements are getting higher and higher. Traditional heating methods can no longer meet the demand. A heating body that can heat quickly, uniformly and consume less energy is sought. In order to meet the high demand of the market, after continuous comparison and experiments by relevant R&D personnel, the pyrolytic boron nitride-pyrolytic graphite composite heater can be heated to thousands of degrees in tens of seconds, and the heating uniformity is controlled in single digits. The excellent performance of within and low energy consumption stands out. [0003] At present, due to the complicated manu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C04B41/89C04B35/52H05B3/14
CPCC04B35/522C04B41/52C04B41/89H05B3/14C04B41/5064C04B41/0072C04B41/4529C04B41/5001C04B41/524
Inventor 刘汝强王殿春孙蕾赵旭荣张佳伟
Owner 山东国晶新材料有限公司