A kind of preparation method of planar composite heater
A heater and plane technology, applied in the direction of heating element materials, etc., can solve the problems of heater scrapping, falling off, cracking, etc.
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Embodiment 1
[0034] A preparation method of a planar composite heater, comprising the steps of:
[0035] (1) The graphite flat plate is a circular flat plate with a diameter of 50mm. The graphite flat plate is used as the substrate, and the surface of the substrate is treated with 1000-mesh sandpaper to make the roughness of the substrate surface 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 2:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 40 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 200 mesh sandpaper, and the surface roughness of the substrate is Ra: 4.0 microns;
[0036] (2) Hang the pyrolytic boron nitride substrate treated in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise at 1400°C, and control the pressure in the reaction furnace at 300Pa; use inert gas as Carrier gas, methane is passed into th...
Embodiment 2
[0040] A preparation method of a planar composite heater, comprising the steps of:
[0041] (1) The graphite flat plate is a circular flat plate with a diameter of 100mm. With the graphite flat plate as the substrate, the surface of the substrate is treated with 2000-mesh sandpaper to make the roughness of the substrate surface 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 3:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 60 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 300 mesh sandpaper, and the surface roughness of the substrate is Ra: 3.0 microns;
[0042] (2) Suspend the treated pyrolytic boron nitride substrate in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise to 1500°C, and control the pressure in the reaction furnace at 400Pa; use inert gas as Carrier gas, methane is passed into the r...
Embodiment 3
[0046] A preparation method of a planar composite heater, comprising the steps of:
[0047] (1) The graphite flat plate is a circular flat plate with a diameter of 150 mm. The graphite flat plate is used as the substrate, and the surface of the substrate is treated with 3000 mesh sandpaper to make the surface roughness of the substrate 3 :BCl 3 Pass it into the reaction furnace at a flow ratio of 5:1 to deposit pyrolytic boron nitride on the surface of the graphite plate at a deposition rate of 80 microns / hour to obtain a pyrolytic boron nitride matrix. The surface of the substrate is polished with 500-grit sandpaper, and the surface roughness of the substrate is Ra: 1.0 microns;
[0048] (2) Suspend the treated pyrolytic boron nitride substrate in step (1) in the reaction furnace, close the furnace cover, heat up and vacuumize, control the temperature rise to 1700°C, and control the pressure in the reaction furnace at 500Pa; use inert gas as Carrier gas, methane is passed in...
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