Magnetoelectricity antenna based on magnetostrictive piezoelectric materials and preparation method thereof

Abstract

The invention discloses a magnetoelectricity antenna based on magnetostrictive piezoelectric materials. The magnetoelectricity antenna comprises a magnetostrictive material layer, a piezoelectric material layer, an interdigital electrode and a silicon suspension substrate. A preparation method of the magnetoelectricity antenna based on the magnetostrictive piezoelectric materials comprises the steps that firstly a whole silicon substrate is subject to corrosion to enable the whole silicon substrate to become the silicon suspension substrate, a magnetron sputtering method is further adopted tomake the interdigital electrode on the surface of the silicon suspension substrate, the magnetron sputtering method is further adopted to deposit the piezoelectric material layer on the interdigital electrode, and finally the magnetron sputtering method is adopted to deposit magnetostrictive material layer on the piezoelectric material layer to obtain the magnetoelectricity antenna. The antenna utilizes the magnetostrictive effect to transform electromagnetic wave into mechanical vibration, and utilizes a highly sensitive vibration induction system to transform the mechanical vibration into electrical signals, indirect induction of the electromagnetic wave can be realized, the magnetoelectricity antenna is not limited by the electrics antenna lambada / 4 wavelength theory and has the advantages of being high in sensitiveness and miniaturized, and the size of an existing antenna can be reduced by several orders of magnitudes.

Description

technical field [0001] The invention belongs to the technical field of antenna miniaturization and micro-nano processing, and relates to a magnetoelectric antenna based on a magnetostrictive piezoelectric material and a preparation method thereof. Background technique [0002] Traditional antennas rely on electromagnetic wave resonance, which results in antennas that are comparable in size to electromagnetic wavelengths. Therefore, the size of the antenna is usually larger than one-tenth of the wavelength. If the size of the antenna is too small, the Q value of the antenna will increase sharply and the bandwidth will be too narrow. Generally, the miniaturization of the antenna is achieved by sacrificing the bandwidth and gain of the antenna. Therefore, it has been an open challenge for decades to further realize the miniaturization of antennas under the premise of ensuring antenna performance. [0003] At present, researches based on antenna miniaturization include: 1. An...

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Problems solved by technology

[0005] In order to achieve the above object, the present invention provides a magnetoelectric antenna based on magnetostrictive piezoelectric material and its preparation method, which solves the problems in the prior art, especially for low-frequency signal antennas, that the miniaturization degree is still not enough, and the performance of some antennas is not good. question

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