Magnetoelectric antenna based on magnetostrictive piezoelectric material and its preparation method

Abstract

The invention discloses a magnetoelectric antenna based on a magnetostrictive piezoelectric material, which comprises a magnetostrictive material layer, a piezoelectric material layer, interdigital electrodes and a silicon suspension substrate. The preparation method of the magnetoelectric antenna based on the magnetostrictive piezoelectric material firstly etches the entire silicon substrate to make it a silicon suspension substrate, and then uses the magnetron sputtering method to fabricate interdigitated electrodes on the surface of the silicon suspension substrate , further adopting the magnetron sputtering method to deposit the piezoelectric material layer on the interdigital electrodes, and finally adopting the magnetron sputtering method to deposit the magnetostrictive material layer on the piezoelectric material layer to obtain the magnetoelectric antenna. The antenna in this paper uses the magnetostrictive effect to convert electromagnetic waves into mechanical vibrations, and uses a highly sensitive vibration induction system to convert mechanical vibrations into electrical signals, which can realize indirect induction of electromagnetic waves, and is not limited by the λ / 4 wavelength theory of electrical antennas. The invention has the advantages of high sensitivity and miniaturization, and the present invention can reduce the size of the existing antenna by several orders of magnitude.

Description

technical field [0001] The invention belongs to the technical field of antenna miniaturization and micro-nano processing, and relates to a magnetoelectric antenna based on a magnetostrictive piezoelectric material and a preparation method thereof. Background technique [0002] Traditional antennas rely on electromagnetic wave resonance, which results in antennas that are comparable in size to electromagnetic wavelengths. Therefore, the size of the antenna is usually larger than one-tenth of the wavelength. If the size of the antenna is too small, the Q value of the antenna will increase sharply and the bandwidth will be too narrow. Generally, the miniaturization of the antenna is achieved by sacrificing the bandwidth and gain of the antenna. Therefore, it has been an open challenge for decades to further realize the miniaturization of antennas under the premise of ensuring antenna performance. [0003] At present, researches based on antenna miniaturization include: 1. An...

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Problems solved by technology

[0005] In order to achieve the above object, the present invention provides a magnetoelectric antenna based on magnetostrictive piezoelectric material and its preparation method, which solves the problems in the prior art, especially for low-frequency signal antennas, that the miniaturization degree is still not enough, and the performance of some antennas is not good. question

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