A fiber-optic ultra-high temperature pressure sensor with temperature compensation function

Abstract

Provided in the invention is a fiber type ultra-high-temperature pressure sensor with the temperature compensation function. The ultra-high-temperature pressure sensor comprises a sensor chip; a signal output of the sensor chip is connected with a high-temperature-resistant fiber; and the sensor chip is installed in a sensor probe. The high-temperature-resistant fiber passes through a packaging board and a fiber casing tube; the fiber casing tube is connected to the packaging board; and packaging of the sensor chip and the high-temperature-resistant fiber is realized by connection of the packaging board and the sensor probe. The sensor chip consists of a pressure-sensitive film and a sensor chip substrate that are combined by thermocompression bonding. A circular concave cavity is formed in the center of the sensor chip substrate; the front side of the pressure-sensitive film is roughened to form a non-smooth surface; and a light reflection film is formed in an area, facing the circular concave cavity, of the back side of the pressure-sensitive film. According to the invention, the ultra-high-temperature pressure sensor is resistant to the ambient temperature of 1000 DEG C and hasthe temperature compensation function; and the influence on the pressure measurement accuracy by the ambient temperature change can be eliminated effectively. The fiber type ultra-high-temperature pressure sensor has characteristics of small size, good corrosion resistance performance and high precision.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to an optical fiber ultra-high temperature pressure sensor with a temperature compensation function. Background technique [0002] The pressure sensor is an indispensable sensor for the research and application of aerospace, marine exploration, petrochemical and other industries. With the continuous deepening of research and application, special pressure sensors with the ability to withstand harsh environments are increasingly valued, such as high overload pressure sensors, high temperature resistant pressure sensors, corrosion resistant pressure sensors, etc. In recent years, the demand for high-temperature resistant pressure sensors in aerospace and petrochemical industries has become increasingly urgent, and high-performance, miniaturized high-temperature resistant pressure sensors have become one of the current international research hotspots. [0003] With the develop...

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Problems solved by technology

Foreign universities and enterprises such as Virginia Institute of Technology in the United States and Oxsensis in the United Kingdom have carried out research on pressure sensors that can withstand higher temperatures, and have developed passive high-temperature resistant pressure sensors based on the principle of optical interference. Related products are expensive, and high-tech technology is blocked from the outside world

Universities such as the University of Electronic Science and Technology of China and North University of China have also carried out research on ultra-high temperature pressure sensors in recent years, but there is no mature product in China yet.

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