The invention relates to a light-driven automatic centering rotary micro-nano motor on a
solid interface, which is in a sheet shape with a center rotationally symmetrical and a non-rotating-shaft radially symmetrical structure, and is formed by
laser processing of a
metal nano material. Normal capturing force pointing to the center of the structure and
tangential force in the parallel
cantilever direction are accumulated in the
pulse duration time, and then rotating torque is output for automatic centering rotation. And a strong output torque (more than 1nN. M) is generated, and the torque is more than 2 orders of magnitude higher than that of a common
electrostatic motor in the MEMS at present. Due to the characteristic of small size, the
torque density is up to 0.1 N.m / mm < 3 >, and the torque
mass ratio is up to 100N.m / kg. By changing parameters such as
laser power, repetition frequency,
light spot shape and size and the like, accurate
rotation control of the micro-nano motor can be realized. The optical tweezer has the advantages of being simple in structure, suitable for working conditions of a
solid interface, free of
thermal damage and the like, can achieve automatic centering rotation of the micro-nano motor on the
solid interface, is used for driving other nano parts and operating target objects, is highly matched and compatible with existing optical tweezer equipment, and is wide in application range.