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Ultrasonic scanning microscope water treatment device and application method thereof

A technology for scanning microscopes and water treatment devices, used in the analysis of solids using sonic/ultrasonic/infrasonic waves, measuring devices, and material analysis using sonic/ultrasonic/infrasonic waves, etc. The effect of eliminating air bubbles, improving scanning speed and detection efficiency

Inactive Publication Date: 2018-12-07
HUAIAN IMAGING DEVICE MFGR CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is necessary to control the scanning speed during C-SAM detection, because the scanning speed determines the moving speed of the ultrasonic probe. If the moving speed is too high, air bubbles will be formed under the ultrasonic probe due to the cavitation of water, and the air bubbles will affect the detection. the result of

Method used

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  • Ultrasonic scanning microscope water treatment device and application method thereof
  • Ultrasonic scanning microscope water treatment device and application method thereof
  • Ultrasonic scanning microscope water treatment device and application method thereof

Examples

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no. 1 example

[0031] figure 2 It is a schematic structural diagram of an ultrasonic scanning microscope water treatment device in the first embodiment of the present invention. Such as figure 2 As shown, the ultrasonic scanning microscope water treatment device includes: an airtight chamber 100, and the material of the airtight chamber 100 may be aluminum alloy. A water inlet 101 , one end of the water inlet 101 is located at the top of the sealed chamber 100 or the upper part of the side wall of the sealed chamber 100 . A water outlet 102 , one end of the water outlet 102 is located at the bottom of the airtight chamber 100 or the lower part of the side wall of the airtight chamber 100 . An air suction port 103 , one end of the air suction port 103 is located on the top of the airtight chamber 100 or on the upper part of the side wall of the airtight chamber 100 .

[0032] In this embodiment, the position of the water inlet 101 is preferably such that water will not flow back after be...

no. 2 example

[0045] image 3 It is a schematic structural diagram of an ultrasonic scanning microscope water treatment device in the second embodiment of the present invention. Such as image 3 As shown, the ultrasonic scanning microscope water treatment device includes: a closed chamber 100 . A water inlet 101 , one end of the water inlet 101 is located at the top of the sealed chamber 100 or the upper part of the side wall of the sealed chamber 100 . A water outlet 102 , one end of the water outlet 102 is located at the bottom of the airtight chamber 100 or the lower part of the side wall of the airtight chamber 100 . An air suction port 103 , one end of the air suction port 103 is located on the top of the airtight chamber 100 or on the upper part of the side wall of the airtight chamber 100 . The water supply heating device 200 is connected with the other end of the water inlet 101 .

[0046] In this embodiment, the introduction about the airtight chamber 100 , the water inlet 101 ...

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Abstract

The technical scheme discloses an ultrasonic scanning microscope water treatment device and an application method thereof. The ultrasonic scanning microscope water treatment device comprises a closedcavity, a water inlet, an extraction opening and a water outlet, wherein the water inlet is communicated with the closed cavity for introducing water to the closed cavity; the extraction opening communicates to the closed cavity for extracting the closed cavity to be lower than barometric pressure; and the water outlet is communicated with the closed cavity for outputting the treated water. By adopting the water treatment device, air bubbles generated when an ultrasonic probe of the ultrasonic scanning microscope water treatment device moves at a high speed are eliminated by changing the pressure to eliminate air in the water, so that the scanning speed and the detection efficiency of a machine tool are improved effectively.

Description

technical field [0001] The invention relates to the manufacturing field of semiconductor devices, in particular to an ultrasonic scanning microscope water treatment device and a use method thereof. Background technique [0002] C-mode Scanning Acoustic Microscope (C-SAM, C-mode Scanning Acoustic Microscope) is an instrument that uses ultrasonic pulses to detect defects such as internal voids in samples. C-SAM uses pure water as the medium to transmit ultrasonic signals. When the signal meets the interface of different materials, it will be partially reflected and transmitted. The intensity of the reflected wave or transmitted wave will be different due to the different density of the material, and then test the inner part of the material. defects, and image the defects according to the received signal changes. [0003] The existing C-SAM is mainly used to observe die bonding failure, delamination, cracks, inclusions, voids, etc. inside the component. It is a non-destructiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/06G01N29/22
CPCG01N29/0681G01N29/22
Inventor 孙必胜刘命江
Owner HUAIAN IMAGING DEVICE MFGR CORP