Device and method for measuring main shaft rotation error by using circular gratings and autocollimators
A technology of autocollimator and rotation error, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of probe wear, affecting measurement accuracy, and shaft surface processing accuracy, so as to eliminate the impact and achieve high precision. The effect of precision positioning
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[0028] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0029] Step 1, calibrate the installation error:
[0030] Step 1-1: If figure 1 As shown, the circular grating 3 is fixed on the flange 8, and then it is fixed as a whole on the right shoulder of the main shaft 2; an annular flat mirror 6 is pasted on the left shoulder of the main shaft 2.
[0031] Step 1-2: Fix the main shaft 2 with the grating and plane mirror installed with the top A1 and the top B10.
[0032] Step 1-3: Install the grating reading heads A4 and B7 on both sides of the circular grating; fix the autocollimator 5 on the left side of the main shaft 2, make the axis of the laser 5-1 parallel to the line connecting the two reading heads, and The light 5-3 hits the annular plane mirror 6 after being reflected by the right-angle mirror 5-4.
[0033] Step 1-4: Starting from the zero position of the grati...
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