Aspheric surface parameter error interference measuring method combining laser differential confocal positioning

Abstract

The invention discloses an aspheric surface parameter error interference measuring method combining laser differential confocal positioning and belongs to the field of aspheric surface measurement. Animplementation method comprises the following steps: acquiring nominal parameters of a measured aspheric surface, and by utilizing the acquired nominal parameters of the measured aspheric surface andcombining optical design software, designing and processing a part-compensating lens and aplanatic lenses; according to the part-compensating lens and the aplanatic lenses, establishing an aspheric surface parameter error interference measuring system combining the laser differential confocal positioning; obtaining an optimal compensation position change by utilizing the system; measuring a surface figure change between the measured aspheric surface and an ideal aspheric surface, and calculating a coefficient of a quartic component of the surface figure change; and according to a simultaneousequation set, calculating a surface figure parameter error of the aspheric surface, thus measurement on the surface figure parameter error of the aspheric surface is realized. The method disclosed bythe invention can improve accuracy of measurement on the surface figure parameter error of the aspheric surface, realizes non-contact, full-aperture, fast and high-accuracy measurement and has the advantages of no scanning device and simple structure.

Description

technical field [0001] The invention relates to an aspherical surface parameter error interferometric measurement method combined with laser differential confocal positioning, belonging to the field of aspheric surface measurement. Background technique [0002] The surface parameters of an aspheric surface include the vertex curvature radius and the quadric surface constant. These two parameters together determine the shape characteristics of the aspheric surface. Among them, the radius of curvature of the vertex not only affects the profile of the aspheric surface, but also determines the basic properties of the aspheric surface, which in turn affects the aberration and imaging quality of the optical system; and the quadric surface constant It is the classification basis of aspheric surface. Accurate measurement of surface parameter errors is very important for the processing and assembly of optical aspheric surfaces. Usually, the surface profile of the measured surface c...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the relative position of the measured surface and part of the compensation lens cannot be determined when the compensation interferometry is used to measure the aspheric parameter error in the prior art, the aspheric parameter error interferometry method combined with laser differential confocal positioning disclosed by the present invention is to be solved The technical problem is: combined with laser differential confocal positioning to determine the relative position of the measured surface and part of the compensation lens, and then improve the measurement accuracy of the surface parameter error of the aspheric surface, and can achieve non-contact, full aperture, fast speed and high precision. The measurement has the advantages of no scanning device and simple structure

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