Laser breakdown spectra measuring system based on beam shaping

Abstract

A laser breakdown spectra measuring system based on beam shaping comprises a pulsed laser, a focusing lens, a sample to be tested, a probe, an optical fiber, a spectrometer, a computer, an ICCD camera, and a programmable beam shaper, wherein the beam shaper is disposed between the pulsed laser and the focusing lens; a laser beam is irradiated onto the sample through the programmable beam shaper and the focusing lens to generate a plasma, the plasma spatial intensity distribution is acquired by the ICCD camera, and the beam spatial intensity distribution is continuously changed by adjusting theprogram of the programmable beam shaper to make the plasma spatial intensity distribution collected by the ICCD camera appear to be evenly distributed. At this time, the amount of ablation of the sample to be tested by the laser and the stability of the plasma spectrum are both improved. The laser breakdown spectra measuring system can make the laser ablate the sample more effectively and uniformly, thereby reducing the internal fluctuation of the plasma, and having great significance for improving the repeatability and accuracy of the LIBS technology measurement.

Description

technical field [0001] The invention relates to a laser breakdown spectrum measurement system, in particular to a laser breakdown spectrum measurement system based on beam shaping, and belongs to the field of laser-induced breakdown spectrum technology and measurement technology. Background technique [0002] Laser-induced breakdown spectroscopy is a new type of atomic emission spectroscopy. Laser breakdown spectroscopy (LIBS) systems mainly include pulsed lasers, spectrometers and other equipment. The basic technical principle is: use a beam of high-energy laser pulses as The excitation source, the laser is focused on the surface of the sample to form a spot with high energy density, so that the sample is gasified in a short time and generates plasma. The temperature of the plasma is very high, and the atoms and ions in the high energy level It will spontaneously transition to a lower energy level and release photons of a specific frequency. The spectrum can be obtained by ...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a laser breakdown spectrum measurement system based on beam shaping, which aims to overcome the problem that the energy distribution of the laser profile is too concentrated and the energy received by the plasma center and the edge area is significantly different, so that the laser can More effective and uniform ablation of the sample, thereby increasing the ablation amount of the laser to the sample to be tested and improving the stability of the plasma spectrum

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