Inorganic flexible transparent perovskite oxide voltage-controlled varactor and preparation method thereof

A technology of perovskite oxide and varactor, which is applied in the direction of variable voltage capacitors, etc., can solve the problem that flexible substrates are not resistant to high temperature, voltage-controlled varactors cannot be flexible and transparent at the same time, and substrates are not stable. With flexibility and other issues, it achieves the effects of excellent tuning rate, high light transmittance and wide application prospects

Active Publication Date: 2018-12-18

NANJING UNIV OF SCI & TECH

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AI-Extracted Technical Summary

Problems solved by technology

[0004] However, the currently widely used voltage-controlled varactors are fabricated on hard substrates. Although some literatures report flexible voltage-controlled varactors or transparent voltage-controlled varactors, the...

Abstract

The invention discloses an inorganic flexible perovskite oxide voltage-controlled varactor and a preparation method thereof. The transparent flexible voltage-controlled varactor consists of a mica substrate, a fully transparent layered (Ag/ITO) n bottom electrode, a perovskite oxide film and a transparent ITO top electrode. The voltage-controlled varactor uses mica as the substrate and O2 as the sputtering gas, a sputtering deposition technology is utilized to deposite on the mica a (Ag/ITO) n bottom electrode of a thickness of 150 nm to 250 nm, the perovskite oxide film of a thickness of 200nm, and with the ITO top electrode of a thickness of 100 nm to 300 nm, thereby obtaining the inorganic flexible transparent perovskite oxide voltage-controlled varactor. The voltage-controlled varactor of the invention has excellent tuning rate and high light transmittance; and is flexible and bending-resistant, when the bending radius is 1.4 mm, the tuning rate is close to the numerical value ina flat state, and the varactor have wide application prospects in flexible and transparent electronic devices.

Application Domain

Capacitor with voltage varied dielectric

Technology Topic

TransmittanceSputter deposition +7

Image

Examples

Experimental program(40)

Example Embodiment

[0026] Example 1

[0027] The specific preparation process of the inorganic flexible fully transparent perovskite oxide voltage-controlled varactor tube of this embodiment is as follows:

[0028] (1) Put a mica substrate with a thickness of 10 μm into the growth chamber of the sputtering deposition system and vacuumize it, then raise the temperature to 300 °C, and sequentially sputter and deposit Ag and ITO thin films. The Ag:ITO thickness ratio is 1:10, and the layer The number is 2 layers, and the total thickness is 150nm;

[0029] (2) (Ag/ITO) prepared in step (1) n The bottom electrode was heated to 650°C, and Bi was deposited by sputtering 3.25 La 0.75 Ti 3 O 12 (BLT) film with a thickness of 200 nm, after which the deposited BLT film was taken out after the temperature dropped to room temperature;

[0030] (3) Cover the mask with the BLT film obtained in step (2), put it into the growth chamber of the sputtering deposition system and evacuate it, then raise the temperature to 300° C., deposit the ITO film by sputtering, and then wait for the temperature to drop to room temperature After that, an inorganic flexible fully transparent BLT voltage-controlled varactor is obtained.

[0031] The light transmittance test, the tuning rate test and the tuning rate test under the bending radius of 1.4mm were carried out on the inorganic flexible fully transparent BLT voltage-controlled varactor at room temperature. The specific test parameters and performance results of the sample 1 obtained in this example are listed in Table 1, figure 1 This is a schematic structural diagram of the inorganic flexible fully transparent BLT voltage-controlled varactor in this embodiment. The light transmittance of the inorganic flexible fully transparent BLT voltage-controlled varactor in the visible light band is as follows: figure 2 As shown, the tuning rate of the inorganic flexible fully transparent BLT voltage-controlled varactor in the flat state and the bent state (r=1.4mm) is as follows image 3 shown.

Example Embodiment

[0032] Example 2

[0033] The specific preparation process of the inorganic flexible fully transparent perovskite oxide voltage-controlled varactor tube of this embodiment is as follows:

[0034] (1) Put a mica substrate with a thickness of 10 μm into the growth chamber of the sputtering deposition system and vacuumize it, then heat it up to 300 °C, and then sputter and deposit Ag and ITO thin films in turn. The Ag:ITO thickness ratio is 1:10, and the layer The number is 2 layers, and the total thickness is 250nm;

[0035] (2) (Ag/ITO) prepared in step (1) n The bottom electrode was heated to 650°C, and Bi was deposited by sputtering 3.25 La 0.75 Ti 3 O 12 (BLT) film with a thickness of 200 nm, after which the deposited BLT film was taken out after the temperature dropped to room temperature;

[0036] (3) Cover the mask with the BLT film obtained in step (2), put it into the growth chamber of the sputtering deposition system and evacuate it, then raise the temperature to 300° C., deposit the ITO film by sputtering, and then wait for the temperature to drop to room temperature After that, an inorganic flexible fully transparent BLT voltage-controlled varactor is obtained.

[0037] The light transmittance test, the tuning rate test and the tuning rate test under the bending radius of 1.4mm were carried out on the inorganic flexible fully transparent BLT voltage-controlled varactor at room temperature. The specific test parameters and performance results of the sample 2 obtained in this example are listed in Table 1, figure 1 This is a schematic structural diagram of the inorganic flexible fully transparent BLT voltage-controlled varactor in this embodiment. The light transmittance of the inorganic flexible fully transparent BLT voltage-controlled varactor in the visible light band is as follows: figure 2As shown, the tuning rate of the inorganic flexible fully transparent BLT voltage-controlled varactor in the flat state and the bent state (r=1.4mm) is as follows image 3 shown.

Example Embodiment

[0038] Example 3

[0039] The specific preparation process of the inorganic flexible fully transparent perovskite oxide voltage-controlled varactor tube of this embodiment is as follows:

[0040] (1) Put a mica substrate with a thickness of 10 μm into the growth chamber of the sputtering deposition system and vacuumize it, then raise the temperature to 300 °C, and sequentially sputter and deposit Ag and ITO thin films. The Ag:ITO thickness ratio is 1:10, and the layer The number is 5 layers, and the total thickness is 150nm;

[0041] (2) (Ag/ITO) prepared in step (1) n The bottom electrode was heated to 650°C, and Bi was deposited by sputtering 3.25 La 0.75 Ti 3 O 12 (BLT) film with a thickness of 200 nm, after which the deposited BLT film was taken out after the temperature dropped to room temperature;

[0042] (3) Cover the mask with the BLT film obtained in step (2), put it into the growth chamber of the sputtering deposition system and evacuate it, then raise the temperature to 300° C., deposit the ITO film by sputtering, and then wait for the temperature to drop to room temperature After that, an inorganic flexible fully transparent BLT voltage-controlled varactor is obtained.

[0043] The light transmittance test, the tuning rate test and the tuning rate test under the bending radius of 1.4mm were carried out on the inorganic flexible fully transparent BLT voltage-controlled varactor at room temperature. The specific test parameters and performance results of the sample 3 obtained in this example are listed in Table 1, figure 1 This is a schematic structural diagram of the inorganic flexible fully transparent BLT voltage-controlled varactor in this embodiment. The light transmittance of the inorganic flexible fully transparent BLT voltage-controlled varactor in the visible light band is as follows: figure 2 As shown, the tuning rate of the inorganic flexible fully transparent BLT voltage-controlled varactor in the flat state and the bent state (r=1.4mm) is as follows image 3 shown.

PUM

Property	Measurement	Unit
Thickness	0.5 ~ 10.0	µm
Total thickness	150.0 ~ 250.0	nm
Thickness	100.0 ~ 300.0	nm

Description & Claims & Application Information

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Classification and recommendation of technical efficacy words

High light transmittance

Inorganic flexible transparent perovskite oxide voltage-controlled varactor and preparation method thereof

AI-Extracted Technical Summary

Problems solved by technology

Abstract

Image

Examples

Example Embodiment

Example Embodiment

Example Embodiment

PUM

Description & Claims & Application Information

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