Inorganic flexible transparent perovskite oxide voltage-controlled varactor and preparation method thereof
A technology of perovskite oxide and varactor, which is applied in the direction of variable voltage capacitors, etc., can solve the problem that flexible substrates are not resistant to high temperature, voltage-controlled varactors cannot be flexible and transparent at the same time, and substrates are not stable. With flexibility and other issues, it achieves the effects of excellent tuning rate, high light transmittance and wide application prospects
Active Publication Date: 2018-12-18
NANJING UNIV OF SCI & TECH
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Abstract
The invention discloses an inorganic flexible perovskite oxide voltage-controlled varactor and a preparation method thereof. The transparent flexible voltage-controlled varactor consists of a mica substrate, a fully transparent layered (Ag/ITO) n bottom electrode, a perovskite oxide film and a transparent ITO top electrode. The voltage-controlled varactor uses mica as the substrate and O2 as the sputtering gas, a sputtering deposition technology is utilized to deposite on the mica a (Ag/ITO) n bottom electrode of a thickness of 150 nm to 250 nm, the perovskite oxide film of a thickness of 200nm, and with the ITO top electrode of a thickness of 100 nm to 300 nm, thereby obtaining the inorganic flexible transparent perovskite oxide voltage-controlled varactor. The voltage-controlled varactor of the invention has excellent tuning rate and high light transmittance; and is flexible and bending-resistant, when the bending radius is 1.4 mm, the tuning rate is close to the numerical value ina flat state, and the varactor have wide application prospects in flexible and transparent electronic devices.
Application Domain
Capacitor with voltage varied dielectric
Technology Topic
TransmittanceSputter deposition +7
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PUM
Property | Measurement | Unit |
Thickness | 0.5 ~ 10.0 | µm |
Total thickness | 150.0 ~ 250.0 | nm |
Thickness | 100.0 ~ 300.0 | nm |
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