Vacuum motor

Abstract

The invention discloses a vacuum motor. The vacuum motor comprises a motor cavity, a bearing cavity, a Roots cavity, a gear cavity, a motor, a driving rotor shaft, a driven rotor shaft, a driven gear,a driving gear, a driving Roots rotor and a driven Roots rotor; the motor is characterized in that the bearing cavity and the gear cavity are arranged on the two sides of the Roots cavity, the motorcavity is connected with the bearing cavity, shaft seal devices are arranged between the bearing cavity and the Roots cavity and between the Roots cavity and the gear cavity, the motor is small in size, large in pulling speed and capable of saving energy and space, due to frequency control, the service life is long, a Teflon dual-lip shaft seal is adopted, the maintaining period of a pump is prolonged, an oil and gas separation device is adopted, the leakage problem of oil steam to a vacuum chamber is solved, the structure that a motor rotor and a pump shaft are integrated, and a motor statoris arranged outside an oil chamber is adopted, the problems of motor dynamic seal and motor vibration are solved, a heat expansion assembling structure is adopted in gear assembling, and unbalance andvibration of a motion part are reduced.

Description

technical field [0001] The invention relates to the technical field of a vacuum motor, in particular to a vacuum motor. Background technique [0002] Roots vacuum motor is evolved from Roots blower, including high vacuum multi-stage Roots pump, medium vacuum Roots booster pump and dry Roots pump with direct exhaust air, which are widely used in chemical industry, papermaking, metallurgy, film preparation , food and other industries, but also a vacuum motor commonly used in the IC equipment industry. The domestic research and manufacture of Roots vacuum motor is earlier, but the Roots dry pump suitable for the strict requirements of the IC equipment industry is rare, resulting in the long-term dependence of this equipment on imports. [0003] The air-cooled Roots dry pump meets many requirements of the IC equipment industry, such as high working temperature, long-term stable operation, low noise, simple maintenance, clean and oil-free, etc. It is a dry low vacuum motor with ...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings of low ultimate vacuum, high power consumption, large volume, and inability to be used in IC equipment in the existing Roots pump technology, the present invention provides a Roots vacuum motor, a new type of Roots dry pump suitable for IC equipment

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