Confocal Displacement Sensor

Abstract

A confocal displacement sensor is provided that has improved measurement accuracy for low reflectivity measurement objects. It includes: a first optical fiber that outputs light from a first output end, and the light for projection is input to its first input end; a second optical fiber that outputs light input through a second input end from a second output end, and the second input The end is opposite to the first output end; the optical component that causes axial chromatic aberration on the detection light emitted through the second output end and converges the detection light to the measurement object; the beam splitter is used to irradiate the measurement object through the optical component Spectrum dispersion of the detection light passing through the second output port by reflection when focusing on the measurement object; measurement control section for calculating the displacement of the measurement object; detachably connecting the second input port to the first output port The optical fiber connection part used; the refractive index matching material between the first output end and the second input end. The second incident end and the first exit end are inclined at a second inclination angle smaller than the first inclination angle of the second exit end.

Description

technical field [0001] The present invention relates to a confocal displacement sensor, and more particularly, to an improvement in a confocal displacement sensor that measures displacement of a measurement object using a confocal optical system. Background technique [0002] The confocal displacement sensor is an optical measurement device that uses the confocal principle (confocal principle) and the phenomenon of axial chromatic aberration (phenomenon of an axial chromatic aberration) to measure the displacement of the measurement object. The light received on the imaging surface of the image of the light source is formed as reflected light by stopping down, and the axial chromatic aberration phenomenon is a phenomenon in which color drift (color drift) in the direction of the optical axis occurs in the image of the light source . [0003] The confocal displacement sensor consists of a pin hole that emits light emitted from a light source for projection as a point light s...

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Therefore, it is difficult to properly remove background components

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