Structural integration in situ driving full displacement composite amplified piezoelectric linear stage

Abstract

A structurally integrated in-situ actuation fully-displaced composite amplified piezoelectric inchworm linear platform comprises a fixed platform and movable platform tops slidably connected through two cross roller guide rails, and stopper bars are arranged below the movable platform tops. A first clamping group and a second clamping group, and a first driving group and a second driving group arearranged between the two stopper bars, and driving units make telescopic movement along the length direction of the stopper bars; each driving unit comprises a clamping arm connected with the telescopic end of the driving unit, the clamping arms release and clamp the stopper bars, and a movable gap is arranged between the adjacent clamping arms. The first clamping group, the first driving group,the second clamping group and the second driving group are sequentially controlled to make the movable platform tops walk and position in an inchworm-like manner. The platform has the advantages of compact structure, large movable table tops, integrated clamping and driving mechanism, low requirement for the machining and assembling precision of the clamping and driving mechanism, sufficient clamping and releasing, power-off clamping, fast moving speed and small moving error.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a nano-positioning platform with a large stroke and high resolution, in particular to a structure-integrated in-situ driven full-displacement composite amplified piezoelectric inchworm linear platform. Background technique [0002] Piezoelectric inchworm linear stage is a precision positioning platform with large stroke and high resolution. Based on the principle of inchworm crawling in bionics, it continuously accumulates the small displacement of the piezoelectric actuator to form a continuous large stroke displacement. Compared with the electromagnetic linear motor type platform, the piezoelectric inchworm linear platform has the advantages of small size, no heat generation, easy control, no end effect and thrust fluctuation; compared with ultrasonic resonance type, inertial drive type piezoelectric linear stage , has the advantages of large output force, high power d...

AI Technical Summary

Problems solved by technology

[0003] 1) Use the external clamping method (that is, the clamping mechanism is located outside the moving table) to clamp the moving table, the platform structure is not compact, and the moving table is small;

[0004] 2) The structure is split, that is, the clamping mechanism and the driving mechanism are designed and manufactured separately, and then they are assembled into one body. Not only the assembly and adjustment process is complicated, but also the contact stiffness between the clamping mechanism and the driving mechanism will be reduced , increase the damping, thereby reducing the natural frequency of the platform and deteriorating the dynamic response characteristics;

[0006] 4) The output displacement of the clamping unit is small, which will make the clamping unit unable to fully clamp or release the moving table, and the moving table cannot be fully clamped, the clamping force it receives will be small, and the motion stability will be reduced ; If the moving table cannot be fully released, serious friction and wear will occur, reducing the life of the platform;

[0007] 5) The platform cannot be self-locked (that is, it cannot be clamped by power failure), that is, when the platform is not working, the moving table cannot be clamped by the clamping unit;

[0008] 6) The driving mechanism also moves in a straight line during the working process, so that the moving mass of the platform becomes larger, which is not conducive to the rapid movement of the platform;

[0009] 7) The single-step displacement of the drive unit is the output displacement of the piezoelectric actuator, which is often very small, so that the movement speed of the platform is low;

[0010] 8) There is no special guiding mechanism, and the stationary precision of the platform depends on the processing and assembly precision of the clamping mechanism and the driving mechanism. In order to make the platform have a small motion error, the processing and assembling precision of the clamping mechanism and the driving mechanism must High, which makes the platform relatively difficult to achieve high motion accuracy

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