Dry ice cleaning device for baffle plate for organic light emitting diode (OLED) evaporation, and process thereof
A technology of dry ice cleaning and baffles, which is applied in the direction of cleaning methods and appliances, chemical instruments and methods, etc., can solve the problems of polluting the environment and high cleaning costs, and achieve the effects of easy operation, low cleaning costs, and simple structure
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[0027] The technical solutions of the present invention will be described in detail below in conjunction with the accompanying drawings, but the scope of protection of the present invention is not limited to the following embodiments.
[0028] see image 3 , the dry ice cleaning device of the baffle for OLED evaporation, including a dry ice generator, a material collector and a cleaning cavity, and the baffle for OLED evaporation to be cleaned is placed in the cleaning cavity; wherein,
[0029] The cleaning chamber is a transparent or translucent closed structure, with a fan filter unit (FFU) on the top, connected to the material collector at the bottom, and a fixing device for the baffle for OLED evaporation to be cleaned inside;
[0030] The dry ice generator is connected to the inside of the cleaning chamber;
[0031] The material collector is equipped with a negative pressure drainage device.
[0032] In a preferred example, the dry ice blasting device further includes a...
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