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OLED display panel, production method thereof and mask for vapor deposition

A display panel and mask plate technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of inconsistent deposition rate, uneven film thickness, uneven display color shift, etc., to achieve The film thickness is uniform, the uniformity is guaranteed, and the effect of weakening the edge shadow effect

Inactive Publication Date: 2019-01-04
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As far as the OLED problem is concerned, the current EL material evaporation is carried out by using a fine metal mask (Fine Metal Mask, FMM), then the above-mentioned problem of uneven color shift will appear, because the center of the pixel and the There is a difference in the thickness of the material in the edge area. The reason for this difference is that in the FMM opening area of ​​​​the corresponding pixel, the deposition rate of the material at the center and the edge is inconsistent, resulting in uneven film thickness, which is commonly referred to as the edge shadow effect ( shadow effect)

Method used

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  • OLED display panel, production method thereof and mask for vapor deposition
  • OLED display panel, production method thereof and mask for vapor deposition

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Embodiment Construction

[0035] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments that the present application can be used to implement. The directional terms mentioned in this application, such as [top], [bottom], [front], [back], [left], [right], [inside], [outside], [side], etc., are for reference only The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the application, but not to limit the application. In the figures, structurally similar elements are denoted by the same reference numerals.

[0036] This application is aimed at the OLED display panel of the prior art, because the deposition rate of the luminescent material at the center and edge of the corresponding pixel area is inconsistent during the evaporation process, resulting in uneven film thickness, thereby causing the edge shadow effect of the display panel problem, this embodiment can solve this de...

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Abstract

The application provides an OLED display panel, a production method thereof and a mask for vapor deposition. The mask for vapor deposition comprises: an opening portion corresponding to multiple deposition areas; a shading portion corresponding to multiple non-deposition areas outside the deposition areas; a barrier film corresponding to the opening portion and fixed to the shading portion, wherein the barrier film is used for controlling transmittance of film material; the different areas of the barrier film have different transmittance rates.

Description

technical field [0001] The present application relates to the technical field of display manufacturing, in particular to an OLED display panel, a preparation method thereof, and a mask plate for evaporation. Background technique [0002] In the OLED process, there are many indicators to evaluate its performance, such as luminous efficiency, response time, viewing angle, manufacturing process, flexible display, device life, display non-uniformity and so on. Among them, the uneven display will lead to obvious color shift, and the brightness of the entire light-emitting area is inconsistent or the color is different. [0003] There are many reasons for display unevenness, which can be roughly divided into two categories: one is the problem of OLED; the other is the problem of TFT. As far as the OLED problem is concerned, the current EL material evaporation is carried out by using a fine metal mask (Fine Metal Mask, FMM), then the above-mentioned problem of uneven color shift w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L27/32H01L51/56H01L51/00H10K99/00
CPCC23C14/042C23C14/24H10K59/122H10K71/166H10K71/00
Inventor 张涛
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD