Extrinsic fabry-perot interferometer ultrasensitive gas sensor based on channel structure of tungsten selenide film

A gas sensor and channel structure technology, applied in the field of sensing, can solve the problems of good controllability, low power consumption, and high sensitivity, and achieve the effects of good thermal stability, low sensing power consumption, and tiny device size

Active Publication Date: 2019-01-08
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

[0005] In view of the above existing problems or deficiencies, in order to solve the problems of existing gas sensors with low cost, simple structure, small size, good controllability, high sensitivity and low power consumption, the present invention provides a channel based on t

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  • Extrinsic fabry-perot interferometer ultrasensitive gas sensor based on channel structure of tungsten selenide film
  • Extrinsic fabry-perot interferometer ultrasensitive gas sensor based on channel structure of tungsten selenide film
  • Extrinsic fabry-perot interferometer ultrasensitive gas sensor based on channel structure of tungsten selenide film

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[0021] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0022] A kind of fiber-optic peroxide ultrasensitive gas sensor based on tungsten selenide thin film channel structure, its structure is as follows figure 1 shown. Using the mature and stable Farpert interferometric sensing principle, the single-mode optical fiber is 6 mm, and the Farpert cavity is 1 cm long, integrated into a quartz capillary with an inner diameter of 125 microns to realize the interference sensing of the concentration of polar gas molecules.

[0023] combine figure 1 , figure 2 As shown, using common single-mode optical fiber, its end face is cut, polished and polished to have a mirror-level surface smoothness, and then 16 layers of silicon dioxide and zirconia dielectric films (5 ), so that it can reach a reflectivity of 97.188% in the 1550 nanometer band, forming a single-mode optical fiber (1) with a high-reflectivity...

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Abstract

The invention belongs to the sensing field and in particular relates to an extrinsic fabry-perot interferometer ultrasensitive gas sensor based on a channel structure of a tungsten selenide film. A tungsten selenide-gold conductive structure is integrated on the end surface of a single mode fiber by adopting a mature and stable sensing principle and combining advanced processes in optics, metamaterial subjects and micro-nano machining. By means of physical absorption and electric adjustable characteristics of tungsten selenide, gas molecules are adsorbed and released by regulating a voltage applied to tungsten selenide. Response speed and sensitivity of the sensor are considered, and meanwhile, the apparatus is small in size, good in thermal stability and relatively small in power consumption of sensing. The response time of the sensor is only 0.01% of that of an electrochemical gas sensor, the sensitivity of the sensor can reach over 1000 times of that of a conventional optical gas sensor, and the power consumption of sensing is reduced to 100 nanowatt. The sensor can be directly integrated to a full optical system to achieve high speed information sensing of a full optical network.

Description

technical field [0001] The invention belongs to the field of sensing, and in particular relates to an optical fiber peroxide ultrasensitive gas sensor based on a tungsten selenide film channel structure, which can detect the gas concentration by detecting the drift of the transmission spectrum. Background technique [0002] With the continuous improvement of people's living standards and the increasing emphasis on environmental protection, the detection of various toxic and harmful gases, the monitoring of air pollution, industrial waste gas, and the detection of food and living environment quality have put forward more and more requirements for gas sensors. high demands. The successful application of new material development technologies such as nanometer and thin film technology provides a good prerequisite for the integration and intelligence of gas sensors. High-performance gas sensors can greatly improve the level of information collection, processing, and deep process...

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Application Information

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IPC IPC(8): G01N21/31G01N21/45
CPCG01N21/31G01N21/45G01N2021/458
Inventor 曹忠旭袁中野姚佰承吴宇饶云江
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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