Calibration method and device for measuring electrical characteristics of microwave semiconductor integrated circuits

Abstract

The invention provides a calibration device for measuring electrical characteristics of a microwave semiconductor integrated circuit. The calibration device comprises a main control unit, microwave semiconductor device multi-parameter test equipment, a calibration channel routing unit, a power calibration module, a standard signal generation module and a vector network analyzer calibration module,wherein the main control unit is configured to receive calibration configuration information and a program control command from the microwave semiconductor device multi-parameter test equipment through external program control and power supply functions; the calibration channel routing unit is used for constructing corresponding output signal power calibration channel, signal receiving characteristic calibration channel and scattering parameter test characteristic calibration channel for test ports respectively; and the power calibration module, the standard signal generation module and the vector network analyzer calculation module are configured to perform automatic calibration of corresponding parameter characteristic tests in a single connection mode.

Description

technical field [0001] The disclosure belongs to the technical field of microwave testing, and in particular relates to a calibration method and device for measuring electrical characteristics of microwave semiconductor integrated circuits. Background technique [0002] With the industrialization of microwave semiconductor integrated circuits, the requirements for the measurement efficiency and accuracy of the electrical characteristics of microwave semiconductor integrated circuits are getting higher and higher. [0003] The schematic diagram of the traditional calibration method for the measurement of the electrical characteristics of microwave semiconductor integrated circuits is as follows: figure 1 shown. to combine figure 1 As well as the demand analysis of practical applications, it can be seen that the traditional calibration method for measuring the electrical characteristics of microwave semiconductor integrated circuits has the following shortcomings: [0004] ...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the deficiencies of the prior art, the present disclosure provides a calibration method and device for measuring the electrical characteristics of microwave semiconductor integrated circuits, through which the efficient integrated measurement and control of multi-parameter test equipment and calibration devices for microwave semiconductor devices can be realized Work, complete the automatic identification and call processing of equipment working status and calibration data, complete the output signal power and scattering parameter calibration of multiple transceiver channels at one time, and realize and provide high-accuracy measurement capability characteristics on the corresponding calibration surface. Support the generalization of relevant electrical characteristics within the scope of measurement and provide efficient and accurate measurement solutions to effectively solve the problems of low efficiency, single function and measurement based on traditional calibration methods that are difficult to unify the calibration surface and the test surface on the same end surface. Accuracy is limited, etc.

Images