Method for preparing gradient nb-si alloy thin film by high-throughput technology

An alloy-based, high-throughput technology, which is applied in measuring devices, metal material coating processes, and material analysis through optical means, can solve the problems of heavy workload, large amount of preparation, and low efficiency, and achieve high cost and improved efficiency. The effect of work efficiency
CN109207952BInactive Publication Date: 2020-01-10BEIHANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIHANG UNIV
Publication Date
2020-01-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a gradient Nb-Si based alloy film preparation method adopting a high flux technology. The preparation method comprises following steps: (1) preparing a Nb-16Si-6Cr-24Ti-6Al matrix; (2) preparing a Cr target material; (3) preparing a xNb-ySi-zTi-kAl target material, x=55-65, y=14-19, z=18-25, and k=1-4, and the numbers are all atomic percentages; (4) installing the Nb-16Si-6Cr-24Ti-6Al matrix prepared in the step (1) on the clamp of a magnetron sputtering facility, placing the Cr target material prepared in the step (2) on a common DC target, putting the xNb-ySi-zTi-kAltarget material prepared in the step (3) on a radio frequency target, and preparing a gradient Nb-Si based alloy film by a magnetron sputtering technology. The method can prepare a great number of Nb-Si based alloys with different ratios, the alloys can be applied to performance tests so as to pick out an optimal ratio, and the work efficiency is improved.
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Description

Technical field

[0001] This application relates to the field of gradient alloy film preparation, and more particularly to a method for preparing a gradient Nb-Si-based alloy film by using a high-throughput technology, a gradient Nb-Si-based alloy film prepared by the method, and applications thereof. Background technique

[0002] As the performance of aero-engines continues to improve, engine blades will endure higher and higher operating temperatures. For example, engines with high thrust ratios require blades to have a temperature resistance of 1200 to 1400°C. At present, the most advanced Ni-based superalloy can withstand a maximum temperature of 1150°C, which cannot meet the requirements of high thrust ratio engine blades. Therefore, it is imperative to develop superalloys that can withstand higher temperatures.

[0003] Metal Nb has excellent room temperature ductility, Nb formed by Nb and Si 5 Si 3 The phase has a melting point (Tm=2620℃) and a high density (7.16g / cm 3 ) Low ...

Claims

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