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Method for preparing gradient nb-si alloy thin film by high-throughput technology

An alloy-based, high-throughput technology, which is applied in measuring devices, metal material coating processes, and material analysis through optical means, can solve the problems of heavy workload, large amount of preparation, and low efficiency, and achieve high cost and improved efficiency. The effect of work efficiency

Inactive Publication Date: 2020-01-10
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

By changing the addition ratio of elements (Nb, Si, Cr, Ti, Al), Nb-Si-based alloys with different compositions are prepared, and then the performance tests of these alloys are carried out in turn, and the element composition ratio corresponding to the optimal performance is selected. This method needs to prepare a large number of samples, the workload is large and the efficiency is low

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  • Method for preparing gradient nb-si alloy thin film by high-throughput technology
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  • Method for preparing gradient nb-si alloy thin film by high-throughput technology

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Embodiment Construction

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are merely examples and are not intended to limit the present application.

[0029] "Material high-throughput preparation" is the preparation of a large number of samples in a short time. The core idea is to change the sequential iterative or trial-and-error methods used in traditional materials research into parallel processing. The present invention provides a method for preparing gradient Nb-Si-based alloys using high-throughput technology, which will be described in detail below through specific examples.

[0030] A method for preparing gradient Nb-Si-based alloys using high-throughput technology includes the following steps:

[0031] Step 1: Preparation and pre-treatment of the substrate

[0032] (A) Using Nb, Si, Ti, Cr, Al as synthetic raw ...

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Abstract

The invention discloses a gradient Nb-Si based alloy film preparation method adopting a high flux technology. The preparation method comprises following steps: (1) preparing a Nb-16Si-6Cr-24Ti-6Al matrix; (2) preparing a Cr target material; (3) preparing a xNb-ySi-zTi-kAl target material, x=55-65, y=14-19, z=18-25, and k=1-4, and the numbers are all atomic percentages; (4) installing the Nb-16Si-6Cr-24Ti-6Al matrix prepared in the step (1) on the clamp of a magnetron sputtering facility, placing the Cr target material prepared in the step (2) on a common DC target, putting the xNb-ySi-zTi-kAltarget material prepared in the step (3) on a radio frequency target, and preparing a gradient Nb-Si based alloy film by a magnetron sputtering technology. The method can prepare a great number of Nb-Si based alloys with different ratios, the alloys can be applied to performance tests so as to pick out an optimal ratio, and the work efficiency is improved.

Description

Technical field [0001] This application relates to the field of gradient alloy film preparation, and more particularly to a method for preparing a gradient Nb-Si-based alloy film by using a high-throughput technology, a gradient Nb-Si-based alloy film prepared by the method, and applications thereof. Background technique [0002] As the performance of aero-engines continues to improve, engine blades will endure higher and higher operating temperatures. For example, engines with high thrust ratios require blades to have a temperature resistance of 1200 to 1400°C. At present, the most advanced Ni-based superalloy can withstand a maximum temperature of 1150°C, which cannot meet the requirements of high thrust ratio engine blades. Therefore, it is imperative to develop superalloys that can withstand higher temperatures. [0003] Metal Nb has excellent room temperature ductility, Nb formed by Nb and Si 5 Si 3 The phase has a melting point (Tm=2620℃) and a high density (7.16g / cm 3 ) Low ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/02C23C14/54C22C27/02G01N23/223G01N21/65
CPCC22C27/02C23C14/021C23C14/16C23C14/352C23C14/548G01N21/658G01N23/223
Inventor 周春根沙江波姜威
Owner BEIHANG UNIV
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