A miniature X-ray source on a chip and a method for manufacturing the same are disclosed
An X-ray and miniature technology, which is applied in the field of X-ray sources, can solve the problems of high batch production cost and difficulty in further reducing the size of micro-X-ray sources, and achieve the effects of reducing production costs, reducing size, and stabilizing X-ray doses
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Embodiment 1
[0093] Referring to Fig. 1(1) and Fig. 1(3), Fig. 1(1) is a schematic cross-sectional structure diagram of an on-chip micro X-ray source provided in Embodiment 1 of the present application; Fig. 1(2) is provided in Embodiment 1 of the present application A schematic diagram of the three-dimensional structure of an on-chip micro X-ray source; FIG. 1 (3) is a schematic diagram of the three-dimensional structure of an on-chip micro X-ray source provided in Embodiment 1 of the present application. It should be noted that Figure 1 (2) is actually not a complete schematic diagram of the structure. In order to see the internal structure, only a part of the anode is drawn.
[0094] An on-chip micro X-ray source provided in Embodiment 1 of the present application includes:
[0095] On-chip micro-electron source 10;
[0096] A first insulating spacer 11 located on the electron-emitting side of the on-chip micro-electron source 10, the first insulating spacer 11 is a cavity structure; ...
Embodiment 2
[0156] see Figure 9(1) to Figure 9(2) , Fig. 9 (1) is a schematic cross-sectional structure diagram of an on-chip micro X-ray source provided in Embodiment 2 of the present application; Fig. 9 (2) is a schematic diagram of a three-dimensional structure of an on-chip micro X-ray source provided in Embodiment 2 of the present application . It should be noted that Fig. 9(2) is actually not a schematic diagram of the complete structure, and only part of the anode is drawn in order to see the internal structure.
[0157] An on-chip micro X-ray source provided in Embodiment 2 of the present application includes:
[0158] On-chip micro-electron source 90;
[0159] A first insulating spacer 91 located on the electron-emitting side of the on-chip micro electron source 90, the first insulating spacer 91 is a cavity structure;
[0160] an anode 92 on the first insulating spacer 91;
[0161] Wherein, a closed vacuum cavity is formed between the on-chip micro electron source 90 and th...
Embodiment 3
[0210] It should be noted that the on-chip micro X-ray source provided in Embodiment 3 of the present application can be obtained by improving on the basis of Embodiment 1 or Embodiment 2 above. As an example, Embodiment 3 of the present application is improved on the basis of Embodiment 2 get.
[0211] see Figure 13 , an on-chip micro X-ray source, it should be noted that, in addition to including all the components in Embodiment 2, the on-chip micro X-ray source may also include:
[0212] The first heat dissipation component 130 located on the anode 92;
[0213] The second heat dissipation component 131 located under the substrate 901 .
[0214] It should be noted that the first heat dissipation component 130 or the second heat dissipation component 131 may be a heat sink or a heat sink with good heat dissipation capability.
[0215] In addition, the first heat dissipation component 130 and the anode 92 , the second heat dissipation component 131 and the substrate 901 ar...
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Abstract
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