Parameter characterization device and detection method for surface defect of high reflection lens of laser gyro

Abstract

The invention relates to a parameter characterization device and a detection method for the surface defect of the high reflection lens of a laser gyro. The device is composed of an integrating sphere,an integrating sphere detector, a CCD imaging assembly, a semiconductor laser, and a light trap. The CCD imaging assembly is composed of a CCD camera, a microlens, and a shading cylinder. The inner part of the shading cylinder is blackened. A movable top cover is arranged on the integrating sphere. A sample to be detected is clamped between a sample holder and the outer wall opposite to the top cover of the integrating sphere. The CCD imaging assembly is arranged right above the sample to be detected. The laser and the light trap are symmetrically arranged on the two sides of the CCD camera.A detector is arranged on the integrating sphere. According to the parameter characterization device and the detection method for the surface defect of the high reflection lens of a laser gyro, the problems in the prior art that the microscopic scattering detection can only acquire the two-dimensional information of the defects, and the integrated scattering rate measurement is long in detection time and low in detection efficiency are overcame.

Description

Technical field: [0001] The invention belongs to the technical field of surface flaw detection of optical elements, and in particular relates to a surface flaw parameter characterization device and detection method of a laser gyro high reflection mirror. Background technique: [0002] Surface defects of optical components mainly refer to pitting, scratches, gap bubbles, broken points and broken edges, etc. In the current detection methods, most of the surface defect detection is processed by the light scattering characteristics of the defect. The reflectivity of the laser gyro high reflector is very high, generally more than 99.99%. The order of magnitude of its surface defects is generally in the order of microns. The parameters of the defects generally include its two-dimensional shape and depth information. In the stage of model simulation (Wang Shitong, Research on Theoretical Modeling and System Analysis of Scattering Imaging for Precision Surface Defect Detection. Doc...

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Problems solved by technology

[0003] The present invention provides a characterization device and detection method for surface defect parameters of laser gyro high-reflection mirrors, so as to overcome the existing microscopic scattering d

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