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Fast and high-precision plane parallelism measuring device

A technology of plane parallelism and measuring device, which is used in electromagnetic measuring device, electrical/magnetic roughness/irregularity measurement and other directions, which can solve the problem of small measurement range, inability to accurately measure small step changes, and poor measurement linearity. and other problems, to achieve the effects of extremely high-precision measurement, strong usability, and avoidance of scratches

Pending Publication Date: 2019-03-01
中核新科(天津)科技有限公司
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Problems solved by technology

[0004] The purpose of the present invention is to overcome the problems in the prior art that the measurement range is small when using contact measurement and non-contact measurement methods to measure the parallelism of the plane, there are requirements for the material, transparency, and magnetism of the plane to be measured, the measurement linearity is not good, and the measurement cannot be accurately measured. The purpose is to provide a fast and high-precision plane parallelism measuring device.

Method used

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  • Fast and high-precision plane parallelism measuring device

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Embodiment Construction

[0032] The following is a detailed description of the fast and high-precision plane parallelism measuring device of the present invention in conjunction with the drawings and embodiments of the description:

[0033] Such as figure 1 As shown, a fast and high-precision plane parallelism measuring device includes a measuring mechanism, a charge amplification differential self-adjusting gain sampling circuit and a sampling control and a main processor 16;

[0034] The measuring mechanism includes a measuring base 2 and a high-voltage DC power supply 5 arranged on the platform 1, and the negative pole 7 of the high-voltage DC power supply 5 is connected to the terminal post 6 of the measuring base 2 through a wire 10; There is an electrode telescopic device 3, the central electrode 4 is connected to the driving shaft of the electrode telescopic device 3, and the reference plane 8 and the plane to be measured 9 are placed on the measurement base 2 and placed under the central elect...

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Abstract

The invention discloses a fast and high-precision plane parallelism measuring device comprising a measuring mechanism, a charge amplifying differential self-adjusting gain sampling circuit, and a sampling control and main processor. According to the measuring device, fast and high-precision measurement of the parallelism is realized based on a positional relationship between a center electrode anda to-be-measured target. The fast and high-precision plane parallelism measuring device is suitable for any plane that is made of a plane material or a glass panel transparent sheet material and thushas the wide application range and high usability. A metal panel plane can be measured directly and a non-metal panel can be measured in a non-contact manner by a measured target, so that the surfaceis protected from being damaged. The fast and extremely-high-precision measurement of the parallelism is realized.

Description

technical field [0001] The invention relates to a plane parallelism measuring device, in particular to a fast and high-precision plane parallelism measuring device. Background technique [0002] In the field of optical processing and mechanical processing, it is often necessary to process flat glass such as optical windows, optical filters, flat mirrors and other components. In mechanical processing, a type of high-precision structural parts will also be processed, which has an impact on the parallelism between the parts. Strict requirements, such as the optical window directly affecting the parallelism of the optical axis of the sensor, require an accurate measurement of the parallelism between the two used surfaces. [0003] Similar patents such as CN 107677219 A a plane parallelism measuring device and a measuring method, CN207570467 U an air-floating parallelism measuring device, and CN 207317714 U a parallelism measuring device. The above-mentioned patents all have sho...

Claims

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Application Information

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IPC IPC(8): G01B7/34
CPCG01B7/34
Inventor 王鸣山张贾强徐鑫
Owner 中核新科(天津)科技有限公司
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