Method for forming semiconductor device

Abstract

In one embodiment, a method includes forming a gate stack on a semiconductor fin, the gate stack having a plurality of gate spacers extending along opposite sides of the gate stack; forming a source / drain adjacent to the gate stack region; recessing the gate stack to form a first recess between the gate spacers; depositing a dielectric layer over the gate stack in the first recess; the dielectric layer and the gate stack in the first recess forming a first metal mask over; etching back the dielectric layer and gate spacers to form the dielectric mask under the first metal mask; depositing a conductive material over the first metal mask and adjacent to the gate stack; and The conductive material is planarized to form a contact electrically connected to the source / drain region, and the top surface of the contact is flush with the top surface of the dielectric mask.

Description

technical field [0001] Embodiments of the disclosure relate to semiconductor technology, and in particular to a method of forming a semiconductor device having a Fin Field-Effect Transistor (FinFET). Background technique [0002] Semiconductor devices are used in various electronic applications, such as personal computers, mobile phones, digital cameras, and other electronic equipment, for example. The manufacture of semiconductor devices generally consists of sequentially depositing insulating or dielectric layers, conductive layers, and semiconductor layers on a semiconductor substrate, and patterning various material layers using photolithography to form circuit components and components on top of them. superior. [0003] The semiconductor industry continues to improve the integration density of various electronic components (such as transistors, diodes, resistors, capacitors, etc.) by continuously reducing the size of the minimum feature, so that more components can be ...

AI Technical Summary

Problems solved by technology

However, when reducing the minimum component size, additional issues arise that should be addressed

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