Universal sample rod and switching device for transmission, scanning and focused ion beam electron microscopes

Abstract

The invention relates to the field of material test, and in particular relates to a universal sample rod and switching device for transmission, scanning and focused ion beam electron microscopes. Thedevice comprises a sample rod, a switching sealing belt flange sleeve, a sealing flange, a corrugated pipe sleeve, and an X-Y-Z three-dimensional siding table and a support thereof; the switching sealing belt flange sleeve is fixed at the tail end of the sample rod, and a sealing ring is used between the inner wall of the switching sealing belt flange sleeve and the sample rod to achieve vacuum seal; the switching sealing belt flange sleeve is placed in the corrugated pipe sleeve, the sealing ring is used between the outer wall of the switching sealing belt flange sleeve and the inner wall ofthe corrugated pipe sleeve to achieve vacuum seal; the X-Y-Z three-dimensional siding table is fixed on the sealing flange and the corrugated pipe sleeve via the sliding table support; and thus, a sample can translate three-dimensions and rotate for 360 degrees around the axis of the rod body. According to the device provided by the invention, the processing and microstructure analysis of the sample are greatly facilitated, the work efficiency is improved, and the device is widely applicable to the various types of transmission, scanning and focused ion beam electron microscopes.

Description

technical field [0001] The invention relates to the field of material testing, in particular to a universal sample rod and an adapter device for transmission, scanning and focused ion beam electron microscopes, belonging to the research field of electron microscope accessories and in-situ measurement of low-dimensional materials. Background technique [0002] Transmission electron microscope analysis technology has high-resolution characteristics of time scale and space scale at the same time, which can deeply understand the intrinsic properties of materials, promote the design and performance optimization of materials, and greatly improve the research and development efficiency of new materials. It is the current nanostructure characterization The most novel and most promising research field. In recent years, transmission electron microscope characterization technology has played an important role in revealing the principle of charge-discharge reaction of lithium-ion batter...

AI Technical Summary

Problems solved by technology

[0003] The main problem of the traditional technology is that the TEM samples often need to be sampled, cut, polished, polished, transferred to the focused ion beam electron microscope for micro-area fine processing, and then entered into the TEM for characterization or the scanning electron microscope for in-situ surface analysis. Or other functional tests, repeat these steps until a suitable sample is obtained

The sample preparation process is not only complicated and time-consuming, but also there is a great risk of damage and contamination in the process of sample transfer, processing and switching between different electron microscopes. research funding

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