Mask plate and making method thereof
A manufacturing method and mask technology, applied in the field of mask, can solve the problems of high scrap rate and low precision, and achieve the effects of reducing scrap rate, improving precision and saving process.
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Example Embodiment
[0021] Example one:
[0022] This embodiment provides a mask, specifically a variable optical transmittance mask.
[0023] Please refer to figure 1 , figure 2 with image 3 The mask includes a substrate 1 and a light-blocking layer 2; the light-blocking layer 2 is laid on the substrate 1; the light-blocking layer 2 is arranged with a plurality of light-transmitting through holes 3, and the light-transmitting through holes 3 are perpendicular to the light-blocking layer. The direction of 2 penetrates the light blocking layer 2, and the aperture a of the light-transmitting through hole 3 is: 0.8um≤a≤4um.
[0024] Specifically, within the value range of the aperture of the light-transmitting through hole 3, the aperture of the light-transmitting through hole 3 is proportional to the optical transmittance of the light blocking layer 2.
[0025] The aperture of the light-transmitting through hole 3 is smaller than the minimum resolution of the aligned exposure system. During exposure, the...
Example Embodiment
[0037] Embodiment two:
[0038] This embodiment provides a method for manufacturing a mask plate, which is used for manufacturing the mask plate in the first embodiment.
[0039] Please refer to Figure 8 , In an embodiment, the manufacturing method of the mask includes:
[0040] Light-transmitting through-hole setting step S1: selecting the shape, aperture and arrangement density of the light-transmitting through-holes according to the transmittance of the mask to be produced, and arranging the selected light-transmitting through-holes on a two-dimensional plane to form light-transmitting In the hole arrangement area, the aperture of the light-transmitting through holes is proportional to the optical transmittance of the light-blocking layer, and the arrangement density of the light-transmitting holes is directly proportional to the optical transmittance of the light-blocking layer;
[0041] Graphic fitting step S2: Project the two-dimensional contour map of the product onto the lig...
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